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010   $a81-322-2144-3
024 7 $a10.1007/978-81-322-2144-9
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035   $a(DE-He213)978-81-322-2144-9
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035   $a(PPN)183521447
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100   $a20150120d2015      u|         0
101 0 $aeng
135   $aur|n|---|||||
181   $ctxt
182   $cc
183   $acr
200 10$aIntroduction to Micromechanisms and Microactuators /$fby Amitabha Ghosh, Burkhard Corves
205   $a1st ed. 2015.
210  1$aNew Delhi :$cSpringer India :$cImprint: Springer,$d2015.
215   $a1 online resource (169 p.)
225 1 $aMechanisms and Machine Science,$x2211-0992 ;$v28
300   $aDescription based upon print version of record.
311 08$a81-322-2143-5 
320   $aIncludes bibliographical references and index.
327   $aIntroduction -- Miniaturization and Microsystems -- Scaling Laws: Science of Miniaturization -- Micromechanisms -- Design of Micromechanisms -- Dynamics of Micromechanisms -- Microactuators -- Microfabrication and Futuristic Issues.
330   $aThis book presents a basic introduction to micromechanisms and microactuators, particularly to their basic configurations and design. This book fills the persisting gap in the published literature on the mechanical manipulative aspects of micromechanisms. It also helps in offering specialized introductory courses on micromechanisms and microactuators not as part of MEMS sensing devices, but as mechanical manipulative systems. The level of the book is suitable for use in both undergraduate and introductory graduate programmes. The book presents an overview of miniaturization and scaling laws, basic design principles of micro-sized mechanisms and actuators, micro-fabrication processes, and some futuristic issues. The volume contains a large number of figures and illustrations for easy understanding by the readers. It will also be useful to researchers and professionals looking for an introduction to the topic.
410  0$aMechanisms and Machine Science,$x2211-0992 ;$v28
606   $aMachinery
606   $aMechatronics
606   $aMicrotechnology
606   $aMicroelectromechanical systems
606   $aMultibody systems
606   $aVibration
606   $aMechanics, Applied
606   $aMachinery and Machine Elements
606   $aMechatronics
606   $aMicrosystems and MEMS
606   $aMultibody Systems and Mechanical Vibrations
615  0$aMachinery.
615  0$aMechatronics.
615  0$aMicrotechnology.
615  0$aMicroelectromechanical systems.
615  0$aMultibody systems.
615  0$aVibration.
615  0$aMechanics, Applied.
615 14$aMachinery and Machine Elements.
615 24$aMechatronics.
615 24$aMicrosystems and MEMS.
615 24$aMultibody Systems and Mechanical Vibrations.
676   $a620
676   $a620.5
676   $a621.8
676   $a629.8
700   $aGhosh$b Amitabha$4aut$4http://id.loc.gov/vocabulary/relators/aut$06057
702   $aCorves$b Burkhard$4aut$4http://id.loc.gov/vocabulary/relators/aut
906   $aBOOK
912   $a9910299683303321
996   $aIntroduction to Micromechanisms and Microactuators$92507761
997   $aUNINA