LEADER 04109nam 22007335 450 001 9910299499303321 005 20200630080656.0 010 $a1-4614-9320-X 024 7 $a10.1007/978-1-4614-9320-4 035 $a(CKB)3710000000089059 035 $a(EBL)1698293 035 $a(OCoLC)881161803 035 $a(SSID)ssj0001160861 035 $a(PQKBManifestationID)11617874 035 $a(PQKBTitleCode)TC0001160861 035 $a(PQKBWorkID)11126396 035 $a(PQKB)10488406 035 $a(MiAaPQ)EBC1698293 035 $a(DE-He213)978-1-4614-9320-4 035 $a(PPN)176748717 035 $a(EXLCZ)993710000000089059 100 $a20140220d2014 u| 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 10$aIntegration of Functional Oxides with Semiconductors /$fby Alexander A. Demkov, Agham B. Posadas 205 $a1st ed. 2014. 210 1$aNew York, NY :$cSpringer New York :$cImprint: Springer,$d2014. 215 $a1 online resource (284 p.) 225 1 $aSpringerBriefs in Materials 300 $aDescription based upon print version of record. 311 $a1-4614-9319-6 320 $aIncludes bibliographical references and index. 327 $aIntroduction -- Critical issues in Oxide-Semiconductor Heteroepitaxy -- Predictive Engineering of Semiconductor-Oxide Interfaces -- Crystalline Functional Oxide Growth Methods -- Thin Oxide Film Characterization Methods -- Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy -- Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates -- Other Epitaxial Oxides on Semiconductors -- Outlook and Parting Thoughts -- Appendices. 330 $aThis unique book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices, and describes possible hybrid semiconductor/oxide systems. The book incorporates both theoretical and experimental advances to explore the heteroepitaxy of tuned functional oxides and semiconductors to identify material, device and characterization challenges, and to present the incredible potential in the realization of multifunctional devices and monolithic integration of materials and devices. This book also: ·         Discusses why semiconductor substrates are an excellent integration platform for making hybrid logic/sensor devices ·         Provides a brief introduction to the methods accessible to non-experts, before going into details of interest to the experts ·         Includes a detailed glossary that explains the specialized terminology and provides insight into the terminology and how it?s used. 410 0$aSpringerBriefs in Materials 606 $aElectronics 606 $aMicroelectronics 606 $aOptical materials 606 $aElectronic materials 606 $aSemiconductors 606 $aElectronics and Microelectronics, Instrumentation$3https://scigraph.springernature.com/ontologies/product-market-codes/T24027 606 $aOptical and Electronic Materials$3https://scigraph.springernature.com/ontologies/product-market-codes/Z12000 606 $aSemiconductors$3https://scigraph.springernature.com/ontologies/product-market-codes/P25150 615 0$aElectronics. 615 0$aMicroelectronics. 615 0$aOptical materials. 615 0$aElectronic materials. 615 0$aSemiconductors. 615 14$aElectronics and Microelectronics, Instrumentation. 615 24$aOptical and Electronic Materials. 615 24$aSemiconductors. 676 $a537.622 676 $a620 676 $a620.11295 676 $a620.11297 700 $aDemkov$b Alexander A$4aut$4http://id.loc.gov/vocabulary/relators/aut$0948389 702 $aPosadas$b Agham B$4aut$4http://id.loc.gov/vocabulary/relators/aut 906 $aBOOK 912 $a9910299499303321 996 $aIntegration of Functional Oxides with Semiconductors$92143776 997 $aUNINA