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010   $a87-438-0253-2
010   $a87-7004-884-3
010   $a3-319-00780-7
024 7 $a10.1007/978-3-319-00780-9
035   $a(OCoLC)869772087
035   $a(MiFhGG)GVRL6WOL
035   $a(CKB)2670000000428598
035   $a(MiAaPQ)EBC1466666
035   $a(MiFhGG)9783319007809
035   $a(DE-He213)978-3-319-00780-9
035   $a(EXLCZ)992670000000428598
100   $a20130917d2014      u|         0
101 0 $aeng
135   $aurun|---uuuua
181   $ctxt
182   $cc
183   $acr
200 10$aMEMS and Nanotechnology, Volume 5 $eProceedings of the 2013 Annual Conference on Experimental and Applied Mechanics /$fedited by Gordon Shaw III, Barton C. Prorok, LaVern Starman, Cosme Furlong
205   $a1st ed. 2014.
210  1$aCham :$cSpringer International Publishing :$cImprint: Springer,$d2014.
215   $a1 online resource (viii, 134 pages) $cillustrations (some color)
225 1 $aConference Proceedings of the Society for Experimental Mechanics Series,$x2191-5652
300   $a"ISSN: 2191-5644."
311 08$a3-319-00779-3 
320   $aIncludes bibliographical references.
327   $aFrom the Contents: Warpage Measurement of Simulated Electronic Packaging Assembly -- Nanomechanical Characterization of Lead Free Solder Joints -- In-Situ Surface Mount Process Characterization Using Digital Image Correlation -- Acoustic Waveform Energy as an Interconnect Damage Indicator -- Shape Optimization of Cantilevered Piezoelectric Devices -- Unique Fabrication Method for Novel MEMS Micro-contact Structure -- A Frequency Selective Surface Design Fabricated With Tunable RF Meta-atoms -- Stress Characterization in Si/SiO2 Spherical Shells Used in Micro-Robotics.
330   $aMEMS and Nanotechnology, Volume 5: Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics, the fifth volume of eight from the Conference, brings together contributions to this important area of research and engineering.  The collection presents early findings and case studies on a wide range of areas, including:   Microelectronics Packaging Single Atom/Molecule Mechanical Testing MEMS Devices & Fabrication In-Situ Mechanical Testing Nanoindentation Experimental Analysis of Low-Dimensional Materials for Nanotechnology.
410  0$aConference Proceedings of the Society for Experimental Mechanics Series,$x2191-5652
606   $aMicrotechnology
606   $aMicroelectromechanical systems
606   $aMechanics, Applied
606   $aNanotechnology
606   $aMicrosystems and MEMS
606   $aEngineering Mechanics
606   $aNanotechnology
615  0$aMicrotechnology.
615  0$aMicroelectromechanical systems.
615  0$aMechanics, Applied.
615  0$aNanotechnology.
615 14$aMicrosystems and MEMS.
615 24$aEngineering Mechanics.
615 24$aNanotechnology.
676   $a621.381
702   $aShaw$b Gordon
801  0$bMiFhGG
801  1$bMiFhGG
906   $aBOOK
912   $a9910299488903321
996   $aMEMS and Nanotechnology, Volume 5$91921642
997   $aUNINA