LEADER 03434nam  22007335  450 
001 9910298599203321
005 20200629162156.0
010   $a3-319-76294-X
024 7 $a10.1007/978-3-319-76294-4
035   $a(CKB)4100000002892454
035   $a(DE-He213)978-3-319-76294-4
035   $a(MiAaPQ)EBC5327236
035   $a(PPN)225551063
035   $a(EXLCZ)994100000002892454
100   $a20180320d2018      u|         0
101 0 $aeng
135   $aurnn|008mamaa
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aPhysical Design and Mask Synthesis for Directed Self-Assembly Lithography /$fby Seongbo Shim, Youngsoo Shin
205   $a1st ed. 2018.
210  1$aCham :$cSpringer International Publishing :$cImprint: Springer,$d2018.
215   $a1 online resource (XIV, 138 p. 92 illus., 54 illus. in color.) 
225 1 $aNanoScience and Technology,$x1434-4904
311   $a3-319-76293-1 
327   $aIntroduction -- DSAL Manufacturability -- Placement Optimization for DSAL -- Placement Optimization for MP-DSAL Compliant Layout -- Redundant Via Insertion for DSAL.
330   $aThis book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.
410  0$aNanoScience and Technology,$x1434-4904
606   $aNanotechnology
606   $aElectronic circuits
606   $aOptical materials
606   $aElectronics$xMaterials
606   $aNanoscience
606   $aNanoscience
606   $aNanostructures
606   $aSemiconductors
606   $aNanotechnology$3https://scigraph.springernature.com/ontologies/product-market-codes/Z14000
606   $aNanotechnology and Microengineering$3https://scigraph.springernature.com/ontologies/product-market-codes/T18000
606   $aCircuits and Systems$3https://scigraph.springernature.com/ontologies/product-market-codes/T24068
606   $aOptical and Electronic Materials$3https://scigraph.springernature.com/ontologies/product-market-codes/Z12000
606   $aNanoscale Science and Technology$3https://scigraph.springernature.com/ontologies/product-market-codes/P25140
606   $aSemiconductors$3https://scigraph.springernature.com/ontologies/product-market-codes/P25150
615  0$aNanotechnology.
615  0$aElectronic circuits.
615  0$aOptical materials.
615  0$aElectronics$xMaterials.
615  0$aNanoscience.
615  0$aNanoscience.
615  0$aNanostructures.
615  0$aSemiconductors.
615 14$aNanotechnology.
615 24$aNanotechnology and Microengineering.
615 24$aCircuits and Systems.
615 24$aOptical and Electronic Materials.
615 24$aNanoscale Science and Technology.
615 24$aSemiconductors.
676   $a620.115
700   $aShim$b Seongbo$4aut$4http://id.loc.gov/vocabulary/relators/aut$0768316
702   $aShin$b Youngsoo$4aut$4http://id.loc.gov/vocabulary/relators/aut
906   $aBOOK
912   $a9910298599203321
996   $aPhysical Design and Mask Synthesis for Directed Self-Assembly Lithography$92505285
997   $aUNINA