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010   $a981-13-2571-5
024 7 $a10.1007/978-981-13-2571-7
035   $a(CKB)4100000006999537
035   $a(MiAaPQ)EBC5541236
035   $a(DE-He213)978-981-13-2571-7
035   $a(PPN)231462417
035   $a(EXLCZ)994100000006999537
100   $a20181005d2018      u|         0
101 0 $aeng
135   $aurcnu||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aThermoelectrical Effect in SiC for High-Temperature MEMS Sensors /$fby Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao
205   $a1st ed. 2018.
210  1$aSingapore :$cSpringer Singapore :$cImprint: Springer,$d2018.
215   $a1 online resource (122 pages)
225 1 $aSpringerBriefs in Applied Sciences and Technology,$x2191-530X
311   $a981-13-2570-7 
327   $aIntroduction to SiC and Thermoelectrical Properties -- Fundamentals of Thermoelectrical Effect in SiC -- Desirable Features for High Temperature SiC Sensors -- Fabrication of SiC MEMS Sensors -- Impact of Design and Process on Performance of SiC Thermal Devices -- Applications of Thermoelectrical Effect in SiC -- Future prospects of SiC Thermoelectrical Sensing Devices.
330   $aThis book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in these sensors, the book provides useful guidance on developing high sensitivity and linearity, fast-response SiC sensing devices based on thermoelectrical effects.
410  0$aSpringerBriefs in Applied Sciences and Technology,$x2191-530X
606   $aNanotechnology
606   $aSolid state physics
606   $aNanotechnology$3https://scigraph.springernature.com/ontologies/product-market-codes/Z14000
606   $aNanotechnology and Microengineering$3https://scigraph.springernature.com/ontologies/product-market-codes/T18000
606   $aSolid State Physics$3https://scigraph.springernature.com/ontologies/product-market-codes/P25013
615  0$aNanotechnology.
615  0$aSolid state physics.
615 14$aNanotechnology.
615 24$aNanotechnology and Microengineering.
615 24$aSolid State Physics.
676   $a547.08
700   $aDinh$b Toan$4aut$4http://id.loc.gov/vocabulary/relators/aut$0769346
702   $aNguyen$b Nam-Trung$4aut$4http://id.loc.gov/vocabulary/relators/aut
702   $aDao$b Dzung Viet$4aut$4http://id.loc.gov/vocabulary/relators/aut
906   $aBOOK
912   $a9910298592903321
996   $aThermoelectrical Effect in SiC for High-Temperature MEMS Sensors$92518408
997   $aUNINA