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010   $a3-319-03131-7
024 7 $a10.1007/978-3-319-03131-6
035   $a(OCoLC)869742136
035   $a(MiFhGG)GVRL6YUK
035   $a(EXLCZ)993710000000078768
100   $a20131209d2014      uy             0
101 0 $aeng
135   $aurun|---uuuua
181   $ctxt
182   $cc
183   $acr
200 00$aSubsecond annealing of advanced materials $eannealing by lasers, flash lamps and swift heavy ions /$fWolfgang Skorupa, Heidemarie Schmidt, editors
205   $a1st ed. 2014.
210  1$aCham [Switzerland] :$cSpringer,$d2014.
215   $a1 online resource (xvii, 321 pages) $cillustrations (some color)
225 1 $aSpringer Series in Materials Science,$x0933-033X ;$v192
300   $a"ISSN: 0933-033X."
311   $a3-319-03130-9 
320   $aIncludes bibliographical references and index.
327   $aFrom the Contents: The very early time -- Nanonet formation by constitutional supercooling of pulsed laser annealed, Mn-implanted germanium -- Metastable activation of dopants by solid phase epitaxial recrystallization -- Superconducting Ga-implanted Germanium -- Structural changes in SiGe/Si layers induced by fast crystallization.
330   $aThe thermal processing of materials ranges from few femtoseconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing. This book offers after an historical excursus selected contributions on fundamental and applied aspects of thermal processing of classical elemental semiconductors and other advanced materials including nanostructures with novel optoelectronic, magnetic, and superconducting properties. Special emphasis is given on the diffusion and segregation of impurity atoms during thermal treatment. A broad range of examples describes the solid phase and/or liquid phase processing of elemental and compound semiconductors, dielectric composites and organic materials.
410  0$aSpringer series in materials science ;$vvolume 192.
606   $aRapid thermal processing
615  0$aRapid thermal processing.
676   $a621.38152
702   $aSkorupa$b Wolfgang
702   $aSchmidt$b Heidemarie$c(Heisenberg-Fellow),
801  0$bMiFhGG
801  1$bMiFhGG
906   $aBOOK
912   $a9910298461403321
996   $aSubsecond Annealing of Advanced Materials$92496417
997   $aUNINA