LEADER 05326nam 22007695 450 001 9910254637603321 005 20200630235904.0 010 $a94-017-7616-4 024 7 $a10.1007/978-94-017-7616-5 035 $a(CKB)3710000000732493 035 $a(DE-He213)978-94-017-7616-5 035 $a(MiAaPQ)EBC4557277 035 $a(PPN)194376621 035 $a(EXLCZ)993710000000732493 100 $a20160614d2016 u| 0 101 0 $aeng 135 $aurnn|008mamaa 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aNon-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes /$fby Nong Moon Hwang 205 $a1st ed. 2016. 210 1$aDordrecht :$cSpringer Netherlands :$cImprint: Springer,$d2016. 215 $a1 online resource (XII, 332 p. 229 illus., 64 illus. in color.) 225 1 $aSpringer Series in Surface Sciences,$x0931-5195 ;$v60 311 $a94-017-7614-8 320 $aIncludes bibliographical references at the end of each chapters and index. 327 $a1 Non-Classical Crystallization -- 2 Thermodynamics of Physical and Chemical Vapour Deposition -- 3 Nucleation -- 4 Growth -- 5 Diamond Synthesis at Low Pressure -- 6 Growth Mechanism of CVD Diamond -- 7 Growth Mechanism of CVD Silicon -- 8 Other Works Related to Non-Classical Crystallization of Thin Films and Nanostructures -- 9 Experimental Confirmation of Charged Nanoparticles during Atmospheric CVD Using Differential Mobility Analyser -- 10 Experimental Confirmation of Charged Nanoparticles at Low Pressure -- 11 Deposition Behavior of Charged Nanoparticles -- 12 Bias Effect on Deposition Behaviour of Charged Nanoparticles -- 13 Charge-Enhanced Kinetics -- 14 Implications and Applications. . 330 $aThis book provides a comprehensive introduction to a recently-developed approach to the growth mechanism of thin films and nanostructures via chemical vapour deposition (CVD). Starting from the underlying principles of the low pressure synthesis of diamond films, it is shown that diamond growth occurs not by individual atoms but by charged nanoparticles. This newly-discovered growth mechanism turns out to be general to many CVD and some physical vapor deposition (PVD) processes. This non-classical crystallization is a new paradigm of crystal growth, with active research taking place on growth in solution, especially in biomineralization processes. Established understanding of the growth of thin films and nanostructures is based around processes involving individual atoms or molecules. According to the author?s research over the last two decades, however, the generation of charged gas phase nuclei is shown to be the rule rather than the exception in the CVD process, and charged gas phase nuclei are actively involved in the growth of films or nanostructures. This new understanding is called the theory of charged nanoparticles (TCN). This book describes how the non-classical crystallization mechanism can be applied to the growth of thin films and nanostructures in gas phase synthesis. Based on the author?s graduate lecture course, the book is aimed at senior undergraduate and graduate students and researchers in the field of thin film and nanostructure growth or crystal growth. It is hoped that a new understanding of the growth processes of thin films and nanostructures will reduce trial-and-error in research and in industrial fabrication processes. 410 0$aSpringer Series in Surface Sciences,$x0931-5195 ;$v60 606 $aSurfaces (Physics) 606 $aInterfaces (Physical sciences) 606 $aThin films 606 $aMaterials?Surfaces 606 $aNanoscience 606 $aNanoscience 606 $aNanostructures 606 $aSemiconductors 606 $aNanotechnology 606 $aSurface and Interface Science, Thin Films$3https://scigraph.springernature.com/ontologies/product-market-codes/P25160 606 $aSurfaces and Interfaces, Thin Films$3https://scigraph.springernature.com/ontologies/product-market-codes/Z19000 606 $aNanoscale Science and Technology$3https://scigraph.springernature.com/ontologies/product-market-codes/P25140 606 $aSemiconductors$3https://scigraph.springernature.com/ontologies/product-market-codes/P25150 606 $aNanotechnology$3https://scigraph.springernature.com/ontologies/product-market-codes/Z14000 615 0$aSurfaces (Physics) 615 0$aInterfaces (Physical sciences) 615 0$aThin films. 615 0$aMaterials?Surfaces. 615 0$aNanoscience. 615 0$aNanoscience. 615 0$aNanostructures. 615 0$aSemiconductors. 615 0$aNanotechnology. 615 14$aSurface and Interface Science, Thin Films. 615 24$aSurfaces and Interfaces, Thin Films. 615 24$aNanoscale Science and Technology. 615 24$aSemiconductors. 615 24$aNanotechnology. 676 $a621.38152 700 $aHwang$b Nong Moon$4aut$4http://id.loc.gov/vocabulary/relators/aut$0815567 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910254637603321 996 $aNon-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes$91820618 997 $aUNINA