LEADER 06672nam 22008175 450 001 9910254194103321 005 20200705135402.0 010 $a3-662-48816-7 024 7 $a10.1007/978-3-662-48816-4 035 $a(CKB)3710000000526937 035 $a(EBL)4182843 035 $a(SSID)ssj0001597341 035 $a(PQKBManifestationID)16297875 035 $a(PQKBTitleCode)TC0001597341 035 $a(PQKBWorkID)14885305 035 $a(PQKB)10647953 035 $a(DE-He213)978-3-662-48816-4 035 $a(MiAaPQ)EBC4182843 035 $a(PPN)190886765 035 $a(EXLCZ)993710000000526937 100 $a20151201d2016 u| 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 10$aMicro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting /$fby Xiao-Sheng Zhang 205 $a1st ed. 2016. 210 1$aBerlin, Heidelberg :$cSpringer Berlin Heidelberg :$cImprint: Springer,$d2016. 215 $a1 online resource (137 p.) 225 1 $aSpringer Theses, Recognizing Outstanding Ph.D. Research,$x2190-5053 300 $a"Doctoral Thesis accepted by Peking University, Beijing, China." 311 $a3-662-48814-0 320 $aIncludes bibliographical references at the end of each chapters. 327 $aSupervisor's Foreword; Abstract; Acknowledgments; Contents; Abbreviations; 1 Introduction; Abstract ; 1.1 Micro-Nanohierarchical Structures in Nature; 1.2 Artificial Micro-Nanohierarchical Structures; 1.2.1 The Progress of Bottom-Up Method; 1.2.2 The Progress of Top-Down Method; 1.3 The Development Progress of Microenergy Field; 1.3.1 Microenergy Technology; 1.3.2 Nanogenerator; 1.3.3 Triboelectric Nanogenerator; 1.4 Research Purpose and Content; 1.4.1 Research Purpose; 1.4.2 Research Content; References; 2 Micro-Nanointegrated Fabrication Technique for Silicon; Abstract 327 $a2.1 Nanoforest Fabrication Based on an Improved DRIE Process2.1.1 Deep Reactive-Ion Etching (DRIE) Process; 2.1.2 Nanostructuring by an Improved DRIE Process; 2.1.3 Mechanism of Controllable Formation of Nanostructures; 2.2 Fabrication of Si-based Micro-Nanohierarchical Structures; 2.2.1 Structural Design; 2.2.2 Fabrication Process; 2.2.3 Characterization and Analysis of Micro-NanoHierarchical Structures; 2.3 Interaction of Multiscale Structures Based on Silicon; 2.4 Properties of Si-Based Micro-NanoHierarchical Structures; 2.4.1 Anti-reflective Property; 2.4.2 Super-hydrophobic Property 327 $a2.5 ConclusionsReferences; 3 Micro-Nanointegrated Fabrication Technique for Flexible Materials; Abstract ; 3.1 Replication Process and Surface-Energy Control; 3.1.1 Replication Process Based on Silicon Mold; 3.1.2 Controllable Fabrication of Ultra-Low-Surface-Energy Silicon Mold; 3.2 Micro-Nanohierarchical Structures Based on PDMS; 3.2.1 Brief Introduction of PDMS; 3.2.2 Single-Step Fabrication of Micro-Nanohierarchical Structures on PDMS; 3.2.3 Key Factors of Single-Step Replication Process; 3.2.4 Effect of Process Parameters on Surface Properties of PDMS 327 $a3.3 Micro-Nanohierarchical Structures Based on Parylene-C3.3.1 Fabrication and Method; 3.3.2 The Properties of Fabricated MNHS Parylene-C Films; 3.4 The Interaction of Multiscale Structures on Flexible Materials; 3.5 The Surface Modification Based on Post-DRIE Process; 3.5.1 Fluorocarbon Plasma Treatment Based on Post-DRIE Process; 3.5.2 The Mechanism of Enhancing Hydrophobicity by Using Post-DRIE Process; 3.6 Conclusions; References; 4 Flexible Triboelectric Nanogenerators: Principle and Fabrication; Abstract ; 4.1 Working Principle of TENG; 4.2 Design of Flexible Sandwich-Shaped TENG 327 $a4.2.1 Structural Geometry and Surface Profile4.2.2 Theoretical Analysis; 4.2.3 Finite Element Simulation; 4.3 Fabrication of the Sandwich-Shaped TENG; 4.4 Electric Properties Test and Analysis of the Sandwich-Shaped TENG; 4.4.1 Test System and Brief Results; 4.4.2 Frequency Effect of External Force on TENG; 4.4.3 Structural Effect on TENG; 4.4.4 Powering Ability for Practical Applications; 4.5 Conclusions; References; 5 Flexible Triboelectric Nanogenerators: Enhancement and Applications; Abstract ; 5.1 Enhancement of TENG Based on Single-Step Fluorocarbon Plasma Treatment 327 $a5.1.1 Structural Design and Fabrication 330 $aThis book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem. 410 0$aSpringer Theses, Recognizing Outstanding Ph.D. Research,$x2190-5053 606 $aNanotechnology 606 $aBiotechnology 606 $aEnergy harvesting 606 $aElectronics 606 $aMicroelectronics 606 $aNanotechnology and Microengineering$3https://scigraph.springernature.com/ontologies/product-market-codes/T18000 606 $aMicroengineering$3https://scigraph.springernature.com/ontologies/product-market-codes/C12040 606 $aEnergy Harvesting$3https://scigraph.springernature.com/ontologies/product-market-codes/117000 606 $aElectronics and Microelectronics, Instrumentation$3https://scigraph.springernature.com/ontologies/product-market-codes/T24027 606 $aNanotechnology$3https://scigraph.springernature.com/ontologies/product-market-codes/Z14000 615 0$aNanotechnology. 615 0$aBiotechnology. 615 0$aEnergy harvesting. 615 0$aElectronics. 615 0$aMicroelectronics. 615 14$aNanotechnology and Microengineering. 615 24$aMicroengineering. 615 24$aEnergy Harvesting. 615 24$aElectronics and Microelectronics, Instrumentation. 615 24$aNanotechnology. 676 $a620.5 700 $aZhang$b Xiao-Sheng$4aut$4http://id.loc.gov/vocabulary/relators/aut$0762873 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910254194103321 996 $aMicro$91547251 997 $aUNINA