LEADER 03743nam  22006975  450 
001 9910254050803321
005 20200706021330.0
024 7 $a10.1007/978-3-319-41990-9
035   $a(CKB)3710000000891748
035   $a(DE-He213)978-3-319-41990-9
035   $a(MiAaPQ)EBC4710244
035   $a(PPN)196322413
035   $a(EXLCZ)993710000000891748
100   $a20161004d2016      u|         0
101 0 $aeng
135   $aurnn|008mamaa
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aHelium Ion Microscopy /$fedited by Gregor Hlawacek, Armin Gölzhäuser
205   $a1st ed. 2016.
210  1$aCham :$cSpringer International Publishing :$cImprint: Springer,$d2016.
215   $a1 online resource (XXIII, 526 p. 320 illus., 204 illus. in color.) 
225 1 $aNanoScience and Technology,$x1434-4904
311   $a3-319-41988-9 
311   $a3-319-41990-0 
320   $aIncludes bibliographical references at the end of each chapters and index.
330   $aThis book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.
410  0$aNanoScience and Technology,$x1434-4904
606   $aSpectrum analysis
606   $aMicroscopy
606   $aMaterials?Surfaces
606   $aThin films
606   $aSurfaces (Physics)
606   $aInterfaces (Physical sciences)
606   $aNanotechnology
606   $aSpectroscopy and Microscopy$3https://scigraph.springernature.com/ontologies/product-market-codes/P31090
606   $aSurfaces and Interfaces, Thin Films$3https://scigraph.springernature.com/ontologies/product-market-codes/Z19000
606   $aSurface and Interface Science, Thin Films$3https://scigraph.springernature.com/ontologies/product-market-codes/P25160
606   $aNanotechnology and Microengineering$3https://scigraph.springernature.com/ontologies/product-market-codes/T18000
615  0$aSpectrum analysis.
615  0$aMicroscopy.
615  0$aMaterials?Surfaces.
615  0$aThin films.
615  0$aSurfaces (Physics)
615  0$aInterfaces (Physical sciences)
615  0$aNanotechnology.
615 14$aSpectroscopy and Microscopy.
615 24$aSurfaces and Interfaces, Thin Films.
615 24$aSurface and Interface Science, Thin Films.
615 24$aNanotechnology and Microengineering.
676   $a578.1
702   $aHlawacek$b Gregor$4edt$4http://id.loc.gov/vocabulary/relators/edt
702   $aGölzhäuser$b Armin$4edt$4http://id.loc.gov/vocabulary/relators/edt
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910254050803321
996   $aHelium Ion Microscopy$92520025
997   $aUNINA