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010   $a3-319-31742-3
024 7 $a10.1007/978-3-319-31742-7
035   $a(CKB)3710000000765470
035   $a(DE-He213)978-3-319-31742-7
035   $a(MiAaPQ)EBC4618238
035   $a(PPN)194515869
035   $a(EXLCZ)993710000000765470
100   $a20160730d2016      u|         0
101 0 $aeng
135   $aurnn|008mamaa
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aNanofabrication $ePrinciples and Applications /$fby Christo Papadopoulos
205   $a1st ed. 2016.
210  1$aCham :$cSpringer International Publishing :$cImprint: Springer,$d2016.
215   $a1 online resource (VI, 81 p. 41 illus., 31 illus. in color.) 
225 1 $aSpringerBriefs in Materials,$x2192-1091
311   $a3-319-31740-7 
320   $aIncludes bibliographical references at the end of each chapters.
327   $aIntroduction -- Silicon Planar Processing and Photolithography -- Direct-write Lithography Approaches -- Stamping Methods -- Scanning-probe Methods -- Natural Lithography -- Direct-Growth and Self-assembly -- Practical Examples and Case Studies of Nanofabrication.
330   $aThis book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated circuits, semiconductor quantum dots, metallic nanoparticles, carbon nanotubes, molecular structures, nanocomposites, arrays and superstructures. Nanofabrication applications in nanoelectronics, biotechnology, nanomechanical devices and nanophotonics will be examined. This brief will present the core concepts of nanofabrication relevant to researchers and industry in this important and rapidly evolving area.
410  0$aSpringerBriefs in Materials,$x2192-1091
606   $aNanotechnology
606   $aElectronics
606   $aMicroelectronics
606   $aSemiconductors
606   $aNanoscience
606   $aNanoscience
606   $aNanostructures
606   $aNanotechnology$3https://scigraph.springernature.com/ontologies/product-market-codes/Z14000
606   $aElectronics and Microelectronics, Instrumentation$3https://scigraph.springernature.com/ontologies/product-market-codes/T24027
606   $aSemiconductors$3https://scigraph.springernature.com/ontologies/product-market-codes/P25150
606   $aNanoscale Science and Technology$3https://scigraph.springernature.com/ontologies/product-market-codes/P25140
615  0$aNanotechnology.
615  0$aElectronics.
615  0$aMicroelectronics.
615  0$aSemiconductors.
615  0$aNanoscience.
615  0$aNanoscience.
615  0$aNanostructures.
615 14$aNanotechnology.
615 24$aElectronics and Microelectronics, Instrumentation.
615 24$aSemiconductors.
615 24$aNanoscale Science and Technology.
676   $a620.115
700   $aPapadopoulos$b Christo$4aut$4http://id.loc.gov/vocabulary/relators/aut$0791315
906   $aBOOK
912   $a9910254034003321
996   $aNanofabrication$92504654
997   $aUNINA