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100   $a20221010d2017      uy             0
101 0 $aeng
135   $aur|||||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 00$aThin film processes $eartifacts on surface phenomena and technological facets /$fedited by Jagannathan Thirumalai
210  1$aRijeka, Croatia :$cIntechOpen,$d[2017]
210  4$dİ2017
215   $a1 online resource (220 pages) $cillustrations
311   $a953-51-3067-6 
320   $aIncludes bibliographical references.
517   $aThin film processes 
606   $aThin films$xIndustrial applications
615  0$aThin films$xIndustrial applications.
676   $a621.38152
702   $aThirumalai$b Jagannathan
801  0$bNjHacI
801  1$bNjHacl
906   $aBOOK
912   $a9910251436803321
996   $aThin film processes$91122104
997   $aUNINA