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010   $a9783038425595
010   $a3038425591
024 8 $a10.3390/books978-3-03842-559-5
035   $a(CKB)4100000001115764
035   $a(oapen)https://directory.doabooks.org/handle/20.500.12854/56375
035   $a(ScCtBLL)4df33ac2-a4b9-4ee9-8a63-093eafe52d05
035   $a(OCoLC)1048188985
035   $a(oapen)doab56375
035   $a(EXLCZ)994100000001115764
100   $a20250203i20172019  uu 
101 0 $aeng
135   $aurmn|---annan
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 00$aPlasma Nanoengineering and Nanofabrication$fMelanie Ramiasa, Krasimir Vasilev
210   $cMDPI - Multidisciplinary Digital Publishing Institute$d2017
210  1$aBasel, Switzerland :$cMDPI,$d2017.
215   $a1 electronic resource (VIII, 170 p.)
311 08$a9783038425588 
311 08$a3038425583 
330   $aPlasma Nanoengineering and Nanofabrication
606   $aChemistry$2bicssc
610   $aCVD
610   $aplasma polymerization
610   $aplasma nanomaterials
610   $aplasma nanosynthesis
610   $aplasma deposition
610   $aplasma etching
615  7$aChemistry
700   $aRamiasa$b Melanie$01786233
702   $aVasilev$b Krasimir
801  0$bScCtBLL
801  1$bScCtBLL
906   $aBOOK
912   $a9910245732003321
996   $aPlasma Nanoengineering and Nanofabrication$94317645
997   $aUNINA