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100   $a20221018d2016      uy             0
101 0 $aeng
135   $aur|||||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 00$aChemical vapor deposition $erecent advances and applications in optical, solar cells and solid state devices /$fedited by Sudheer Neralla
210  1$aRijeka, Croatia :$cIntechOpen,$d[2016]
210  4$dİ2016
215   $a1 online resource (290 pages) $cillustrations
311   $a953-51-2572-9 
320   $aIncludes bibliographical references.
517   $aChemical vapor deposition 
517   $aChemical Vapor Deposition - Recent Advances and Applications in Optical, Solar Cells and Solid State Devices
606   $aChemical vapor deposition
615  0$aChemical vapor deposition.
676   $a621.38152
702   $aNeralla$b Sudheer 
801  0$bNjHacI
801  1$bNjHacl
906   $aBOOK
912   $a9910169219203321
996   $aChemical vapor deposition$92156887
997   $aUNINA