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100   $a20160829d1987      uy              
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 00$aEmerging semiconductor technology : a symposium
210 31$a[Place of publication not identified]$cAmerican Society for Testing and Materials$d1987
225 0 $aASTM special technical publication  Emerging semiconductor technology 
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-8031-0459-6 
606   $aSemiconductor industry$xCongresses
606   $aSemiconductors$xDesign and construction$xCongresses
606   $aElectrical & Computer Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
606   $aElectrical Engineering$2HILCC
615  0$aSemiconductor industry$xCongresses
615  0$aSemiconductors$xDesign and construction$xCongresses
615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
615  7$aElectrical Engineering
676   $a621.3815/2
702   $aLanger$b Paul H
702   $aGupta$b D. C
712 02$aASTM Committee F-1 on Electronics
712 12$aSymposium on Semiconductor Processing$d(4th :$f1986 :$eSan Jose, Calif.)
801  0$bPQKB
906   $aBOOK
912   $a9910164692103321
996   $aEmerging semiconductor technology : a symposium$91968158
997   $aUNINA