LEADER 01703oam  2200493zu 450 
001 9910164688903321
005 20210807002136.0
010   $a0-8031-5107-1
035   $a(CKB)3170000000045402
035   $a(SSID)ssj0001184371
035   $a(PQKBManifestationID)11771236
035   $a(PQKBTitleCode)TC0001184371
035   $a(PQKBWorkID)11191630
035   $a(PQKB)11513523
035   $a(EXLCZ)993170000000045402
100   $a20160829d1989      uy              
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 00$aSemiconductor fabrication : technology and metrology
210 31$a[Place of publication not identified]$cASTM$d1989
225 0 $aSTP  Semiconductor fabrication 
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-8031-1273-4 
517   $aSemiconductor Fabrication
606   $aSemiconductors$xCongresses$xDesign and construction
606   $aElectrical & Computer Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
606   $aElectrical Engineering$2HILCC
615  0$aSemiconductors$xCongresses$xDesign and construction
615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
615  7$aElectrical Engineering
676   $a621.381/52
702   $aGupta$b D. C
712 02$aSemiconductor Equipment and Materials Institute
712 02$aASTM Committee F-1 on Electronics
712 12$aSymposium on Semiconductor Processing$d(5th :$f1988 :$eSanta Clara, Calif.)
801  0$bPQKB
906   $aBOOK
912   $a9910164688903321
996   $aSemiconductor fabrication : technology and metrology$92205702
997   $aUNINA