LEADER 01506oam  2200445zu 450 
001 9910164285003321
005 20210807002217.0
010   $a0-8031-5431-3
035   $a(CKB)3170000000044338
035   $a(SSID)ssj0001489998
035   $a(PQKBManifestationID)11826024
035   $a(PQKBTitleCode)TC0001489998
035   $a(PQKBWorkID)11458872
035   $a(PQKB)10730280
035   $a(EXLCZ)993170000000044338
100   $a20160829d2000      uy              
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 10$aGate Dielectric Integrity: Material, Process, and Tool Qualification
210 31$a[Place of publication not identified]$cAmerican Society for Testing & Materials$d2000
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-8031-2615-8 
517   $aGate Dielectric Integrity
606   $aElectrical & Computer Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
606   $aElectrical Engineering$2HILCC
615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
615  7$aElectrical Engineering
676   $a621.3815/2
700   $aGupta$b D. C$0863878
702   $aBrown$b George A
712 12$aConference on Gate Dielectric Integrity$f(1999 :$eSan Jose, Calif.)
801  0$bPQKB
906   $aBOOK
912   $a9910164285003321
996   $aGate Dielectric Integrity: Material, Process, and Tool Qualification$91960875
997   $aUNINA