LEADER 01801nam  2200601z  450 
001 9910149131303321
005 20200806084138.0
010   $a9784339108378
010   $a4339108375
010   $a9784339208375
010   $a433920837X
035   $a(CKB)3720000000050188
035   $a(JP-MeL)3000017702
035   $a(JP-MeKC)3000397132
035   $a(EXLCZ)993720000000050188
100   $a20211007d2012      |||         |
101 0 $ajpn
135   $aur|n||||un|||
181   $2ncrcontent
182   $2ncrmedia
183   $2ncrcarrier
200 10$a????MEMS?????????
210   $a??$c????$d2012.9
210  1$a?? : $c????, $d2012
215   $a???????1?
300   $a??????: ???, ????, ????, ???, ???, ???
300   $a???????: p[212]-222
311 08$a9784339008371 
311 08$a4339008370 
517 3 $a???MEMS?????????
606   $6880-04/$1$a???$2jlabsh
606   $6880-05/$1$a???????$2jlabsh
606   $6880-06/$1$a?????$2jlabsh
606   $6880-07/$1$a????????????$2ndlsh
615  7$a???
615  7$a???????
615  7$a?????
615  7$a????????????
686   $a549.8$2njb/09
686   $a431.8$2njb/09
686   $a431.3$2njb/09
701   $a??$b ??
701   $a??$b ??
701   $a??$b ?
701   $a??$b ??
701   $a??$b ??
701   $a??$b ?
701   $a?$b ??
701   $a??$b ?
801  1$bJP-MeL
906   $aBOOK
912   $a9910149131303321
997   $aUNINA