LEADER 01516oas 2200385z- 450 001 9910147138703321 005 20180209194330.0 011 $a1347-5525 035 $a(CKB)111054751708008 035 $a(EXLCZ)99111054751708008 100 $a20170808cuuuuuuuu -u- - 101 0 $ajpn 200 00$a???????????????????????? [[????????????E??????????????]] 210 $c???? ???? 300 $aRefereed/Peer-reviewed 311 $a1341-8939 517 $a????????????E?????????????? 531 $adenki gakkai ronbunshi E sensa maikuro mashin bumonshi 531 $aIEEJ TRANSACTIONS ON SENSORS AND MICROMACHINES 606 $aChemistry$xApplied Chemistry 606 $aEngineering$xElectronics 606 $aEngineering$xInstrumentation 606 $aPhysics$xOptics & Opto Electronics 606 $aPhysics$xUltrasonic 606 $aTelecommunications Technology$xGeneral and Others 615 4$aChemistry$xApplied Chemistry 615 4$aEngineering$xElectronics 615 4$aEngineering$xInstrumentation 615 4$aPhysics$xOptics & Opto Electronics 615 4$aPhysics$xUltrasonic 615 4$aTelecommunications Technology$xGeneral and Others 906 $aJOURNAL 912 $a9910147138703321 996 $a????????????????????????$92244073 997 $aUNINA