LEADER 01164oam  2200373zu 450 
001 9910146819403321
005 20241212215316.0
010   $a9781509097500
010   $a1509097503
035   $a(CKB)1000000000022719
035   $a(SSID)ssj0000395976
035   $a(PQKBManifestationID)12144192
035   $a(PQKBTitleCode)TC0000395976
035   $a(PQKBWorkID)10456890
035   $a(PQKB)11113694
035   $a(EXLCZ)991000000000022719
100   $a20160829d2005      uy 
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 10$aIEEE/LEOS Optical MEMs 2005 : International Conference on Optical MEMs and Their Applications : 1-4 August 2005, Holiday Club Eden, Oulu, Finland
210 31$a[Place of publication not identified]$cIEEE$d2005
300   $aBibliographic Level Mode of Issuance: Monograph
311 08$a9780780392786 
311 08$a0780392787 
606   $aOptical MEMS$vCongresses
615  0$aOptical MEMS
712 12$aInternational Conference on Optical MEMs and Their Applications
801  0$bPQKB
906   $aPROCEEDING
912   $a9910146819403321
996   $aIEEE$9878179
997   $aUNINA