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010   $a1-280-55680-3
010   $a9786610556809
010   $a0-471-66878-8
010   $a0-470-35744-4
010   $a0-471-66879-6
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100   $a20030326d2003      uy             0
101 0 $aeng
135   $aurcnu||||||||
181   $ctxt
182   $cc
183   $acr
200 10$aULSI semiconductor technology atlas /$fChih-Hang Tung, George T.T. Sheng, Chih-Yuan Lu$b[electronic resource]
210   $aHoboken, NJ $cJohn Wiley$dc2003
215   $a1 online resource (xii, 666 p. )$cill. ;
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-471-45772-8 
320   $aIncludes bibliographical references and index.
330   $aUltra Large Scale Integration (ULSI) refers to chips with more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and associated problems.
606   $aIntegrated circuits$xUltra large scale integration$vAtlases
606   $aElectron microscopy
606   $aElectrical Engineering$2HILCC
606   $aElectrical & Computer Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
608   $aElectronic books
615  0$aIntegrated circuits$xUltra large scale integration
615  0$aElectron microscopy.
615  7$aElectrical Engineering
615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
676   $a621.39/5
700   $aTung$b Chih-Hang$f1963-$0921749
701   $aSheng$b George T. T$0921750
701   $aLu$b Chih-Yuan$f1950-$0921751
801  0$bDLC
801  1$bDLC
906   $aBOOK
912   $a9910146058303321
996   $aULSI semiconductor technology atlas$92068016
997   $aUNINA
999   $aThis Record contains information from the Harvard Library Bibliographic Dataset, which is provided by the Harvard Library under its Bibliographic Dataset Use Terms and includes data made available by, among others the Library of Congress