LEADER 05318nam 2200649Ia 450 001 9910146057103321 005 20230617031359.0 010 $a1-280-25476-9 010 $a9786610254767 010 $a0-470-35761-4 010 $a0-471-67886-4 010 $a0-471-65382-9 035 $a(CKB)1000000000019085 035 $a(EBL)227403 035 $a(OCoLC)228136455 035 $a(SSID)ssj0000207869 035 $a(PQKBManifestationID)11169015 035 $a(PQKBTitleCode)TC0000207869 035 $a(PQKBWorkID)10238463 035 $a(PQKB)11711661 035 $a(MiAaPQ)EBC227403 035 $a(Au-PeEL)EBL227403 035 $a(CaPaEBR)ebr10114090 035 $a(CaONFJC)MIL25476 035 $a(EXLCZ)991000000000019085 100 $a20040202d2005 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 00$aNano-CMOS circuit and physical design$b[electronic resource] /$fBan P. Wong ... [et al.] 210 $aHoboken, N.J. $cJohn Wiley$dc2005 215 $a1 online resource (413 p.) 300 $aDescription based upon print version of record. 311 $a0-471-46610-7 320 $aIncludes bibliographical references and index. 327 $aNANO-CMOS CIRCUIT AND PHYSICAL DESIGN; CONTENTS; FOREWORD; PREFACE; 1 NANO-CMOS SCALING PROBLEMS AND IMPLICATIONS; 1.1 Design Methodology in the Nano-CMOS Era; 1.2 Innovations Needed to Continue Performance Scaling; 1.3 Overview of Sub-100-nm Scaling Challenges and Subwavelength Optical Lithography; 1.3.1 Back-End-of-Line Challenges (Metallization); 1.3.2 Front-End-of-Line Challenges (Transistors); 1.4 Process Control and Reliability; 1.5 Lithographic Issues and Mask Data Explosion; 1.6 New Breed of Circuit and Physical Design Engineers; 1.7 Modeling Challenges 327 $a1.8 Need for Design Methodology Changes1.9 Summary; References; PART I PROCESS TECHNOLOGY AND SUBWAVELENGTH OPTICAL LITHOGRAPHY: PHYSICS, THEORY OF OPERATION, ISSUES, AND SOLUTIONS; 2 CMOS DEVICE AND PROCESS TECHNOLOGY; 2.1 Equipment Requirements for Front-End Processing; 2.1.1 Technical Background; 2.1.2 Gate Dielectric Scaling; 2.1.3 Strain Engineering; 2.1.4 Rapid Thermal Processing Technology; 2.2 Front-End-Device Problems in CMOS Scaling; 2.2.1 CMOS Scaling Challenges; 2.2.2 Quantum Effects Model; 2.2.3 Polysilicon Gate Depletion Effects; 2.2.4 Metal Gate Electrodes 327 $a2.2.5 Direct-Tunneling Gate Leakage2.2.6 Parasitic Capacitance; 2.2.7 Reliability Concerns; 2.3 Back-End-of-Line Technology; 2.3.1 Interconnect Scaling; 2.3.2 Copper Wire Technology; 2.3.3 Low-? Dielectric Challenges; 2.3.4 Future Global Interconnect Technology; References; 3 THEORY AND PRACTICALITIES OF SUBWAVELENGTH OPTICAL LITHOGRAPHY; 3.1 Introduction and Simple Imaging Theory; 3.2 Challenges for the 100-nm Node; 3.2.1 ?-Factor for the 100-nm Node; 3.2.2 Significant Process Variations; 3.2.3 Impact of Low-? Imaging on Process Sensitivities; 3.2.4 Low-? Imaging and Impact on Depth of Focus 327 $a3.2.5 Low-? Imaging and Exposure Tolerance3.2.6 Low-? Imaging and Impact on Mask Error Enhancement Factor; 3.2.7 Low-? Imaging and Sensitivity to Aberrations; 3.2.8 Low-? Imaging and CD Variation as a Function of Pitch; 3.2.9 Low-? Imaging and Corner Rounding Radius; 3.3 Resolution Enhancement Techniques: Physics; 3.3.1 Specialized Illumination Patterns; 3.3.2 Optical Proximity Corrections; 3.3.3 Subresolution Assist Features; 3.3.4 Alternating Phase-Shift Masks; 3.4 Physical Design Style Impact on RET and OPC Complexity; 3.4.1 Specialized Illumination Conditions 327 $a3.4.2 Two-Dimensional Layouts3.4.3 Alternating Phase-Shift Masks; 3.4.4 Mask Costs; 3.5 The Road Ahead: Future Lithographic Technologies; 3.5.1 The Evolutionary Path: 157-nm Lithography; 3.5.2 Still Evolutionary: Immersion Lithography; 3.5.3 Quantum Leap: EUV Lithography; 3.5.4 Particle Beam Lithography; 3.5.5 Direct-Write Electron Beam Tools; References; PART II PROCESS SCALING IMPACT ON DESIGN; 4 MIXED-SIGNAL CIRCUIT DESIGN; 4.1 Introduction; 4.2 Design Considerations; 4.3 Device Modeling; 4.4 Passive Components; 4.5 Design Methodology; 4.5.1 Benchmark Circuits 327 $a4.5.2 Design Using Thin Oxide Devices 330 $aBased on the authors' expansive collection of notes taken over the years, Nano-CMOS Circuit and Physical Design bridges the gap between physical and circuit design and fabrication processing, manufacturability, and yield. This innovative book covers: process technology, including sub-wavelength optical lithography; impact of process scaling on circuit and physical implementation and low power with leaky transistors; and DFM, yield, and the impact of physical implementation. 606 $aMetal oxide semiconductors, Complementary$xDesign and construction 606 $aIntegrated circuits$xDesign and construction 615 0$aMetal oxide semiconductors, Complementary$xDesign and construction. 615 0$aIntegrated circuits$xDesign and construction. 676 $a621.39/732 701 $aWong$b Ban P.$f1953-$0856272 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910146057103321 996 $aNano-CMOS circuit and physical design$92157708 997 $aUNINA