LEADER 01082nam  2200337   450 
001 9910145451503321
005 20230831080728.0
010   $a1-5090-9298-6
035   $a(CKB)1000000000278228
035   $a(NjHacI)991000000000278228
035   $a(EXLCZ)991000000000278228
100   $a20230831d2006      uy             0
101 0 $aeng
135   $aur|||||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 /$fInstitute of Electrical and Electronics Engineers
210  1$a[Place of publication not identified] :$cIEEE,$d2006.
215   $a1 online resource (378 pages)
311   $a0-7803-9562-X 
531   $aOPTICAL MEMS & THEIR APPLICATIONS CONFERENCE, 2006. IEEE/LEOS INTERNATIONAL CONFERENCE ON
606   $aOptical MEMS
615  0$aOptical MEMS.
676   $a621.36
801  0$bNjHacI
801  1$bNjHacl
906   $aPROCEEDING
912   $a9910145451503321
996   $aIEEE$9878179
997   $aUNINA