LEADER 03404oas 2201153 a 450 001 9910144566803321 005 20251105213014.0 011 $a1520-8559 035 $a(DE-599)ZDB1475424-1 035 $a(DE-599)1475424-1 035 $a(OCoLC)37329463 035 $a(CONSER)sn 98004661 035 $a(CKB)954925535070 035 $a(EXLCZ)99954925535070 100 $a19970721a19839999 uy a 101 0 $aeng 135 $aurcnu|||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aJournal of vacuum science & technology$hA$iVacuum, surfaces, and films 210 $aWoodbury, N.Y. $cPublished for the American Vacuum Society by the American Institute of Physics$d[1983-] 300 $aRefereed/Peer-reviewed 300 $aTitle from PDF of issue table of contents (AIP, viewed Nov. 9, 2006). 311 08$a0734-2101 517 3 $aJournal of vacuum science and technology. 517 1 $aJournal of vacuum science & technology. 517 3 $aVacuum, surfaces, and films 517 1 $aJVST A 517 1 $aJournal of vacuum science & technology. 531 0 $aJ. vac. sci. technol., A, Vac. surf. films 606 $aVacuum technology$vPeriodicals 606 $aSurfaces (Physics)$vPeriodicals 606 $aSurface chemistry$vPeriodicals 606 $aThin films$vPeriodicals 606 $aVide (Technologie)$vPe?riodiques 606 $aChimie des surfaces$vPe?riodiques 606 $aSurfaces (Physique)$vPe?riodiques 606 $aCouches minces$vPe?riodiques 606 $aSurface chemistry$2fast$3(OCoLC)fst01139210 606 $aSurfaces (Physics)$2fast$3(OCoLC)fst01139265 606 $aThin films$2fast$3(OCoLC)fst01150018 606 $aVacuum technology$2fast$3(OCoLC)fst01163626 606 $aVacuum technology$vPeriodicals$2nli 606 $aSurfaces (Physics)$vPeriodicals$2nli 606 $aSurface chemistry$vPeriodicals$2nli 606 $aThin films$vPeriodicals$2nli 608 $aPeriodicals. 608 $aPeriodicals.$2fast 608 $aPeriodicals.$2lcgft 615 0$aVacuum technology 615 0$aSurfaces (Physics) 615 0$aSurface chemistry 615 0$aThin films 615 6$aVide (Technologie) 615 6$aChimie des surfaces 615 6$aSurfaces (Physique) 615 6$aCouches minces 615 7$aSurface chemistry. 615 7$aSurfaces (Physics) 615 7$aThin films. 615 7$aVacuum technology. 615 7$aVacuum technology 615 7$aSurfaces (Physics) 615 7$aSurface chemistry 615 7$aThin films 676 $a621 712 02$aAmerican Vacuum Society 712 02$aAmerican Institute of Physics 801 0$bGZM 801 1$bGZM 801 2$bOCL 801 2$bNSD 801 2$bOCLCQ 801 2$bMUQ 801 2$bTXA 801 2$bKSU 801 2$bCIT 801 2$bOCLCQ 801 2$bDLC 801 2$bOCLCQ 801 2$bOCLCO 801 2$bOCLCF 801 2$bOCLCO 801 2$bOCLCQ 801 2$bOCLCA 801 2$bAU@ 801 2$bLIP 801 2$bSFB 801 2$bVT2 801 2$bVLY 801 2$bOCLCQ 801 2$bAUD 801 2$bOCLCL 801 2$bOCLCQ 906 $aJOURNAL 912 $a9910144566803321 996 $aJournal of vacuum science & technology$9791404 997 $aUNINA