LEADER 01798oam  2200529zu 450 
001 9910144116503321
005 20210721054705.0
010   $a1-281-84300-8
010   $a9786611843007
010   $a3-527-61674-8
010   $a3-527-61696-9
035   $a(CKB)1000000000555819
035   $a(SSID)ssj0000202224
035   $a(PQKBManifestationID)11181297
035   $a(PQKBTitleCode)TC0000202224
035   $a(PQKBWorkID)10251773
035   $a(PQKB)11584420
035   $a(MiAaPQ)EBC1161985
035   $a(EXLCZ)991000000000555819
100   $a20160829d2006      uy              
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 00$aMicro process engineering : fundamentals, devices, fabrication, and applications
210 31$a[Place of publication not identified]$cWiley VCH$d2006
225 0 $aAdvanced micro & nanosystems  Micro process engineering 
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a3-527-31246-3 
606   $aProduction engineering
606   $aMicrotechnology
606   $aIndustrial & Management Engineering$2HILCC
606   $aMechanical Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
615  0$aProduction engineering
615  0$aMicrotechnology
615  7$aIndustrial & Management Engineering
615  7$aMechanical Engineering
615  7$aEngineering & Applied Sciences
676   $a670.42
700   $aKockmann                      $b Norbert; Brand, Oliver; Fedder                        , Gary K$0977626
702   $aKockmann$b Norbert
801  0$bPQKB
906   $aBOOK
912   $a9910144116503321
996   $aMicro process engineering : fundamentals, devices, fabrication, and applications$92227293
997   $aUNINA