LEADER 04493nam 2200673 450 001 9910143417603321 005 20211109143509.0 010 $a1-280-45023-1 010 $a9786610450237 010 $a0-470-35916-1 010 $a0-471-79028-1 010 $a1-61583-845-7 010 $a0-471-79027-3 024 7 $a10.1002/0471790281 035 $a(CKB)1000000000354621 035 $a(EBL)258858 035 $a(SSID)ssj0000159985 035 $a(PQKBManifestationID)11179287 035 $a(PQKBTitleCode)TC0000159985 035 $a(PQKBWorkID)10159647 035 $a(PQKB)10193464 035 $a(MiAaPQ)EBC258858 035 $a(CaBNVSL)mat05201952 035 $a(IDAMS)0b0000648104af7b 035 $a(IEEE)5201952 035 $a(OCoLC)85820981 035 $a(EXLCZ)991000000000354621 100 $a20151221d2006 uy 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 10$aFundamentals of semiconductor manufacturing and process control /$fGary S. May, Costas J. Spanos 210 1$a[Piscataway, New Jersey] :$cIEEE,$dc2006. 210 2$a[Piscataqay, New Jersey] :$cIEEE Xplore,$d[2006] 215 $a1 online resource (485 p.) 300 $aDescription based upon print version of record. 311 $a0-471-78406-0 320 $aIncludes bibliographical references and index. 327 $aIntroduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis. 330 $aA practical guide to semiconductor manufacturing from process control to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts. Following an overview of manufacturing and technology, the text explores process monitoring methods, including those that focus on product wafers and those that focus on the equipment used to produce wafers. Next, the text sets forth some fundamentals of statistics and yield modeling, which set the foundation for a detailed discussion of how statistical process control is used to analyze quality and improve yields. The discussion of statistical experimental design offers readers a powerful approach for systematically varying controllable process conditions and determining their impact on output parameters that measure quality. The authors introduce process modeling concepts, including several advanced process control topics such as run-by-run, supervisory control, and process and equipment diagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and management of overall manufacturing systems * Chapters include case studies, sample problems, and suggested exercises * Instructor support includes electronic copies of the figures and an instructor's manual Graduate-level students and industrial practitioners will benefit from the detailed exami?nation of how electronic materials and supplies are converted into finished integrated circuits and electronic products in a high-volume manufacturing environment. An Instructor's Manual presenting detailed solutions to all the problems in the book is available from the Wiley editorial department. An Instructor Support FTP site is also available. 606 $aSemiconductors$xDesign and construction 606 $aIntegrated circuits$xDesign and construction 606 $aProcess control$xStatistical methods 615 0$aSemiconductors$xDesign and construction. 615 0$aIntegrated circuits$xDesign and construction. 615 0$aProcess control$xStatistical methods. 676 $a621.3815/2 676 $a621.38152 700 $aMay$b Gary S.$0151097 701 $aSpanos$b Costas J$0770689 801 0$bCaBNVSL 801 1$bCaBNVSL 801 2$bCaBNVSL 906 $aBOOK 912 $a9910143417603321 996 $aFundamentals of semiconductor manufacturing and process control$91572624 997 $aUNINA