LEADER 00942nam0-22003251i-450- 001 990000515730403321 005 20140424115107.0 010 $a0-256-06920-4 035 $a000051573 035 $aFED01000051573 035 $a(Aleph)000051573FED01 035 $a000051573 100 $a20020821d1989----km-y0itay50------ba 101 0 $aeng 105 $aa-------001yy 200 1 $aProduction and operations management$ea life cycle approach$fRichard B. Chase, Nicholas J. Aquilano 205 $a5th ed. 210 $aBoston$cIrwin$d1989 215 $a942 p.$cill.$d23 cm 225 1 $aIrwin series in quantitative analysis for business 610 0 $aGestione della produzione 676 $a658.4 700 1$aChase,$bRichard B. 701 1$aAquilano,$bNicholas J. 801 0$aIT$bUNINA$gRICA$2UNIMARC 901 $aBK 912 $a990000515730403321 952 $a10 D III 634$bdis 2976$fDINEL 959 $aDINEL 997 $aUNINA LEADER 01193nam0 22002891i 450 001 UON00428926 005 20231205104858.926 100 $a20130711f1977 |0itac50 ba 101 $aita 102 $aIT 105 $a|||| 1|||| 200 1 $aIbsen$einvito alla lettura di Ruggero Jacobbi$fScipio Slataper 210 $aFirenze$cVallecchi$dc1977 215 $aXII, 241 p.$d22 cm. 410 1$1001UON00306005$12001 $aBiblioteca Vallecchi$1210 $aFirenze$cVallecchi 606 $aIBSEN HENRIK$3UONC040347$2FI 606 $aJACOBBI RUGGERO$3UONC044194$2FI 620 $aIT$dFirenze$3UONL000052 676 $a801.95$cCritica letteraria$v21 700 1$aSLATAPER$bScipio$3UONV175455$0158726 712 $aVallecchi$3UONV246715$4650 801 $aIT$bSOL$c20240220$gRICA 912 $aUON00428926 950 $aSIBA - SISTEMA BIBLIOTECARIO DI ATENEO$dSI ITA II 2135 $eSI LO 46448 7 2135 950 $aSIBA - SISTEMA BIBLIOTECARIO DI ATENEO$dSI ITA II 1268 $eSI LO 4668 5 1268 $sBuono 996 $aIbsen$988820 997 $aUNIOR LEADER 05347nam 2200697Ia 450 001 9911019772503321 005 20200520144314.0 010 $a9781299475991 010 $a129947599X 010 $a9783527664375 010 $a3527664378 010 $a9783527664344 010 $a3527664343 010 $a9783527664351 010 $a3527664351 035 $a(CKB)2670000000263091 035 $a(EBL)1037093 035 $a(OCoLC)816311244 035 $a(SSID)ssj0000776680 035 $a(PQKBManifestationID)11513830 035 $a(PQKBTitleCode)TC0000776680 035 $a(PQKBWorkID)10746454 035 $a(PQKB)11548699 035 $a(MiAaPQ)EBC1037093 035 $a(Perlego)1011825 035 $a(EXLCZ)992670000000263091 100 $a20121016d2013 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 12$aA practical guide to optical metrology for thin films /$fMichael Quinten 210 $aWeinheim $cWiley-VCH$dc2013 215 $a1 online resource (225 p.) 300 $aDescription based upon print version of record. 311 08$a9783527411672 311 08$a3527411674 320 $aIncludes bibliographical references (p. 201-208) and index. 327 $aA Practical Guide to Optical Metrology for Thin Films; Contents; Preface; 1 Introduction; 2 Propagation of Light and Other Electromagnetic Waves; 2.1 Properties of Electromagnetic Waves; 2.2 Huygens-Fresnel Principle; 2.3 Interference of Electromagnetic Waves; 2.4 Reflection and Refraction; 2.5 Diffraction; 2.5.1 Transmission Gratings; 2.5.1.1 Lamellar Transmission Gratings; 2.5.1.2 Holographic Transmission Gratings; 2.5.2 Reflection Gratings; 2.5.2.1 Lamellar Reflection Gratings; 2.5.2.2 Blazed Gratings; 2.5.2.3 Holographic Gratings; 2.6 Scattering 327 $a2.7 Dielectric Function and Refractive Index2.7.1 Models for the Dielectric Function; 2.7.2 Kramers-Kronig Analysis of Dielectric Functions; 2.7.3 Empiric Formulas for the Refractive Index; 2.7.4 EMA Models; 3 Spectral Reflectance and Transmittance of a Layer Stack; 3.1 Reflectance and Transmittance of a Single Layer; 3.1.1 Coherent Superposition of Reflected Light; 3.1.2 Influence of Absorption on the Layer; 3.1.3 Partial Incoherence due to Thick Substrates; 3.1.4 Partial Incoherence due to Roughness; 3.1.5 Coherent Superposition of Transmitted Light 327 $a3.2 Propagating Wave Model for a Layer Stack3.2.1 Coherent Reflectance and Transmittance of a Layer Stack; 3.2.2 Consideration of Incoherent Substrates; 3.2.3 Consideration of Surface Roughness; 3.2.4 r-t-ø Model for a Layer Stack; 4 The Optical Measurement; 4.1 Spectral Reflectance and Transmittance Measurement; 4.2 Ellipsometric Measurement; 4.3 Other Optical Methods; 4.3.1 Prism Coupling; 4.3.2 Chromatic Thickness Determination; 4.4 Components for the Optical Measurement; 4.4.1 Light Sources; 4.4.1.1 Halogen Lamps; 4.4.1.2 White Light LED; 4.4.1.3 Superluminescence Diodes 327 $a4.4.1.4 Xenon High-Pressure Arc Lamps4.4.1.5 Deuterium Lamps; 4.4.2 Optical Components; 4.4.2.1 Lenses and Mirrors; 4.4.2.2 Polarizers and Analyzers; 4.4.2.3 Optical Retarders; 4.4.3 Optical Fibers; 4.4.4 Miniaturized Spectrometers; 4.4.4.1 Gratings; 4.4.4.2 Detectors; 4.4.4.3 System Properties; 5 Thin-Film Thickness Determination; 5.1 Fast Fourier Transform; 5.1.1 Single Layer; 5.1.2 Layer Stack; 5.1.3 Accuracy, Resolution, Repeatability, and Reproducibility; 5.2 Regression Analysis with ?2-Test; 5.2.1 Method of Thickness Determination 327 $a5.2.2 Accuracy, Resolution, Repeatability, and Reproducibility6 The Color of Thin Films; 7 Applications; 7.1 High-Reflection and Antireflection Coatings; 7.1.1 HR Coatings on Metallic Mirrors; 7.1.2 AR Coatings on Glass; 7.1.3 AR Coatings on Solar Wafers; 7.2 Thin Single- and Double-Layer Coatings; 7.2.1 SiO2 on Silicon Wafers; 7.2.2 Si3N4 Hardcoat; 7.2.3 Double-Layer System; 7.2.4 Porous Silicon on Silicon; 7.3 Photoresists and Photolithographic Structuring; 7.4 Thickness of Wafers and Transparent Plastic Films; 7.4.1 Thickness of Semiconductor, Glass, and Sapphire Wafers 327 $a7.4.2 Thickness of Transparent Plastic Films 330 $a A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light a 606 $aThin films$xOptical properties 606 $aThin films$xMeasurement 606 $aOptical measurements 615 0$aThin films$xOptical properties. 615 0$aThin films$xMeasurement. 615 0$aOptical measurements. 676 $a530.4275 700 $aQuinten$b Michael$021849 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9911019772503321 996 $aA practical guide to optical metrology for thin films$94416452 997 $aUNINA LEADER 03208oas 2201189 a 450 001 9910143257003321 005 20251105213014.0 011 $a1435-165X 035 $a(DE-599)ZDB1463026-6 035 $a(DE-599)1463026-6 035 $a(OCoLC)42809473 035 $a(CONSER) 2008233038 035 $a(CKB)954925585281 035 $a(EXLCZ)99954925585281 100 $a19991111a19929999 sy a 101 0 $aeng 135 $aurunu|||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aEuropean child & adolescent psychiatry 210 $a[Darmstadt] $cSteinkopff 210 31$a[Place of publication not identified] :$c[SpringerLink],$d1992- 300 $aRefereed/Peer-reviewed 311 08$a1018-8827 517 3 $aEuropean child and adolescent psychiatry 606 $aChild psychiatry$vPeriodicals 606 $aAdolescent psychiatry$vPeriodicals 606 $aPsychology, Pathological$vPeriodicals 606 $aMental Disorders 606 $aAdolescent Psychiatry 606 $aChild Psychiatry 606 $aAdolescents$xPsychiatrie$vPe?riodiques 606 $aEnfants$xPsychiatrie$vPe?riodiques 606 $aAdolescent psychiatry$2fast$3(OCoLC)fst00797015 606 $aChild psychiatry$2fast$3(OCoLC)fst00854531 606 $aPsychology, Pathological$2fast$3(OCoLC)fst01081609 606 $aPsiquiatria infantil$2thub 606 $aPsiquiatria de l'adolescència$2thub 606 $aPsicopatologia$2thub 608 $aPeriodical. 608 $aPeriodicals.$2fast 608 $aPeriodicals.$2lcgft 608 $aRevistes electròniques.$2thub 615 0$aChild psychiatry 615 0$aAdolescent psychiatry 615 0$aPsychology, Pathological 615 2$aMental Disorders. 615 2$aAdolescent Psychiatry. 615 2$aChild Psychiatry. 615 6$aAdolescents$xPsychiatrie 615 6$aEnfants$xPsychiatrie 615 7$aAdolescent psychiatry. 615 7$aChild psychiatry. 615 7$aPsychology, Pathological. 615 7$aPsiquiatria infantil. 615 7$aPsiquiatria de l'adolescència. 615 7$aPsicopatologia. 676 $a616.928 712 02$aEuropean Society of Child and Adolescent Psychiatry, 801 0$bGAT 801 1$bGAT 801 2$bOCLCQ 801 2$bMUQ 801 2$bHUA 801 2$bOCLCQ 801 2$bOCL 801 2$bGUA 801 2$bMYG 801 2$bOCLCQ 801 2$bUKMGB 801 2$bOCLCQ 801 2$bOCLCO 801 2$bOCLCQ 801 2$bOCLCF 801 2$bOCLCO 801 2$bOCLCQ 801 2$bWT2 801 2$bOCLCQ 801 2$bTOF 801 2$bMYUML 801 2$bAU@ 801 2$bOCLCO 801 2$bOCLCA 801 2$bDLC 801 2$bVT2 801 2$bU3W 801 2$bOCLCO 801 2$bNJT 801 2$bOCLCA 801 2$bUBY 801 2$bOCLCO 801 2$bQGK 801 2$bOCLCQ 801 2$bUAB 801 2$bSFB 801 2$bOCLCL 801 2$bOCLCQ 906 $aJOURNAL 912 $a9910143257003321 996 $aEuropean child & adolescent psychiatry$92234731 997 $aUNINA