LEADER 01334nam 2200373 450 001 9910143043803321 005 20230721025509.0 010 $a1-5090-8261-1 035 $a(CKB)1000000000331357 035 $a(WaSeSS)IndRDA00119537 035 $a(EXLCZ)991000000000331357 100 $a20200305d2007 uy 0 101 0 $aeng 135 $aur||||||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$a2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems $e16-19 January 2007, Bangkok, Thailand /$fInstitute of Electrical and Electronics Engineers 210 1$aPiscataway, New Jersey :$cInstitute of Electrical and Electronics Engineers,$d2007. 215 $a1 online resource (xvi, 1214 pages) 311 $a1-4244-0609-9 311 $a1-4244-0610-2 606 $aNanoelectromechanical systems$vCongresses 606 $aMicroelectromechanical systems$vCongresses 615 0$aNanoelectromechanical systems 615 0$aMicroelectromechanical systems 676 $a620.5 712 02$aInstitute of Electrical and Electronics Engineers, 801 0$bWaSeSS 801 1$bWaSeSS 906 $aPROCEEDING 912 $a9910143043803321 996 $a2007 2nd IEEE International Conference on Nano$92509973 997 $aUNINA