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200 10$a2007 IEEE International Conference on Microelectronic Test Structures : ICMTS : conference proceedings : March 19-22, Takeda Hall, The University of Tokyo, Japan
210 31$a[Place of publication not identified]$cIEEE$d2007
300   $aBibliographic Level Mode of Issuance: Monograph
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712 12$aIEEE International Conference on Microelectronic Test Structures
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