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200 10$a2007 IEEE/IEOS International Conference on Optical MEMS and Nanophotonics : Hualien, Taiwan, 12-16 August, 2007
210 31$a[Place of publication not identified]$cIEEE$d2007
300   $aBibliographic Level Mode of Issuance: Monograph
311 08$a9781424406418 
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606   $aMicroelectromechanical systems$vCongresses
606   $aOptical MEMS$vCongresses
606   $aNanophotonics$vCongresses
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615  0$aNanophotonics
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