LEADER 01458nas 2200433 c 450 001 9910893571303321 005 20250513224326.0 035 $a(CKB)5280000000197221 035 $a(DE-599)ZDB2555195-4 035 $a(OCoLC)1164173165 035 $a(OCoLC)643726723 035 $a(DE-101)1002766354 035 $a(EXLCZ)995280000000197221 100 $a20100520b20072012 |y | 101 0 $ager 135 $aur||||||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aStatistische Berichte / Statistisches Amt für Hamburg und Schleswig-Holstein$hL$hIV$h1$i˜Dieœ Umsätze der steuerpflichtigen Unternehmen in Hamburg und Schleswig-Holstein ... : Ergebnisse der Umsatzsteuerstatistik ; Voranmeldungen 210 31$aHamburg$aKiel$cStatistisches Amt fu?r Hamburg und Schleswig-Holstein$d2007-2012 215 $aOnline-Ressource 225 0 $aDer Norden za?hlt 300 $aGesehen am 07.08.15 517 $aStatistische Berichte / L / IV / 1 517 1 $aStatistische Berichte / L / 4 / 1 517 3 $aStatistischer Bericht / L / 4 / 1 517 3 $aErgebnisse der Umsatzsteuerstatistik 608 $aZeitschrift$2gnd-content 608 $aStatistik$2gnd-content 676 $a330 676 $a310 801 0$b9001 801 1$bDE-101 801 2$b9001 906 $aJOURNAL 912 $a9910893571303321 996 $aStatistische Berichte$91920339 997 $aUNINA LEADER 03897nam 2200661 a 450 001 9911020433203321 005 20200520144314.0 010 $a9786612346200 010 $a9781282346208 010 $a1282346202 010 $a9780470017944 010 $a0470017945 010 $a9780470065419 010 $a0470065419 035 $a(CKB)1000000000357405 035 $a(EBL)290997 035 $a(OCoLC)476048340 035 $a(SSID)ssj0000138763 035 $a(PQKBManifestationID)11158392 035 $a(PQKBTitleCode)TC0000138763 035 $a(PQKBWorkID)10100704 035 $a(PQKB)11779710 035 $a(MiAaPQ)EBC290997 035 $a(PPN)175354006 035 $a(Perlego)2757716 035 $a(EXLCZ)991000000000357405 100 $a20060918d2007 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 00$aDielectric films for advanced microelectronics /$fedited by Mikhail Baklanov, Martin Green, and Karen Maex 210 $aChichester, England ;$aHoboken, NJ $cJohn Wiley & Sons$dc2007 215 $a1 online resource (510 p.) 225 1 $aWiley series in materials for electronic and optoelectronic applications 300 $aDescription based upon print version of record. 311 08$a9780470013601 311 08$a0470013605 320 $aIncludes bibliographical references and index. 327 $tLow and ultralow dielectric constant films prepared by plasma-enhanced chemical vapor deposition /$rA. Grill --$tSpin-on dielectric materials /$rGeraud Dubois, Robert D. Miller, Willi Volksen --$tPositron annihilation spectroscopy /$rDavid W. Gidley, Hua-Gen Peng, Richard Vallery --$tStructure characterization of nanoporous interlevel dielectric thin films with x-ray and neutron radiation /$rChristopher L. Soles ... [et al.] --$tEllipsometric porosimetry /$rMikhail R. Baklanov --$tMechanical and transport properties of low-k dielectrics /$rJ. L. Plawsky ... [et al.] --$tIntegration of low-k dielectric films in damascene processes /$rR. J. O. M. Hoofman ... [et al.] --$tONO structures and oxynitrides in modern microelectronics : material science, characterization and application /$rYakov Roizin, Vladimir Gritsenko --$tMaterial engineering of high-k gate dielectrics /$rAkira Toriumi, Koji Kita --$tPhysical characterization of ultra-thin high-k dielectric /$rT. Conard, H. Bender, W. Vandervorst --$tElectrical characterization of advanced gate dielectrics /$rRobin Degraeve ... [et al.] --$tIntegration issues of high-k gate dielectrics /$rYasuo Nara --$tAnisotropic conductive film (ACF) for advanced microelectronic interconnects /$rYi Li, C. P. Wong. 330 $aThe topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials. 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