LEADER 01950oam 2200505zu 450 001 996216841703316 005 20210807003420.0 035 $a(CKB)111055184256742 035 $a(SSID)ssj0000393514 035 $a(PQKBManifestationID)12111399 035 $a(PQKBTitleCode)TC0000393514 035 $a(PQKBWorkID)10363643 035 $a(PQKB)10074158 035 $a(EXLCZ)99111055184256742 100 $a20160829d2002 uy 101 0 $aeng 181 $ctxt 182 $cc 183 $acr 200 10$a10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada 210 31$a[Place of publication not identified]$cIEEE$d2002 300 $aBibliographic Level Mode of Issuance: Monograph 311 $a0-7803-7465-7 606 $aSemiconductors$xHeat treatment$vCongresses 606 $aRapid thermal processing$xDefects$vCongresses 606 $aSemiconductor doping$vCongresses 606 $aSemiconductors$vCongresses 606 $aElectrical Engineering$2HILCC 606 $aElectrical & Computer Engineering$2HILCC 606 $aEngineering & Applied Sciences$2HILCC 615 0$aSemiconductors$xHeat treatment 615 0$aRapid thermal processing$xDefects 615 0$aSemiconductor doping 615 0$aSemiconductors 615 7$aElectrical Engineering 615 7$aElectrical & Computer Engineering 615 7$aEngineering & Applied Sciences 702 $aGelpey$b Jeffrey C 712 02$aIEEE Electron Devices Society 712 12$aInternational Conference on Advanced Thermal Processing of Semiconductors 801 0$bPQKB 906 $aPROCEEDING 912 $a996216841703316 996 $a10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada$92500993 997 $aUNISA LEADER 01108nas 2200385 c 450 001 9910141240903321 005 20260218112500.0 011 $a1775-4135 035 $a(CKB)2670000000127622 035 $a(DE-101)1115862499 035 $a(DE-599)ZDB2871026-5 035 $a(DE-599)2871026-5 035 $a(EXLCZ)992670000000127622 100 $a20161013a20069999 |y | 101 0 $afre 135 $aur||||||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 00$aObservatoire de la socie?te? britannique$erevue de civilisation britannique contemporaine 210 31$aLa Garde$cFac. des Lettres et Sciences Humaines, Univ. du Sud Toulon-Var$d[2006]- 215 $aOnline-Ressource 300 $aGesehen am 13. Oktober 2016 311 08$a1957-3383 608 $aZeitschrift$2gnd-content 676 $a910 676 $a940 676 $a820 801 0$b0355 801 1$bDE-101 801 2$b9001 906 $aJOURNAL 912 $a9910141240903321 996 $aObservatoire de la socie?te? britannique$91976554 997 $aUNINA