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135   $aur|n|---|||||
181   $ctxt
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183   $acr
200 00$aMechanical stress on the nanoscale$b[electronic resource] $esimulation, material systems and characterization techniques /$fedited by Margrit Hanbu?cken, Pierre Mu?ller, and Ralf B. Wehrspohn
210   $aWeinheim, Germany $cWiley-VCH$d2011
215   $a1 online resource (382 p.)
300   $aDescription based upon print version of record.
311   $a3-527-41066-X 
320   $aIncludes bibliographical references and index.
327   $apt. 1. Fundamentals of stress and strain on the nanoscale -- pt. 2. Model systems with stress-engineered properties -- pt. 3. Characterization techniques of measuring stresses on the nanoscale.
330   $aBringing together experts from the various disciplines involved, this first comprehensive overview of the current level of stress engineering on the nanoscale is unique in combining the theoretical fundamentals with simulation methods, model systems and characterization techniques. Essential reading for researchers in microelectronics, optoelectronics, sensing, and photonics.
606   $aNanoscience
606   $aMechanics
615  0$aNanoscience.
615  0$aMechanics.
676   $a620.115
701   $aHanbu?cken$b Margrit$0945105
701   $aMu?ller$b Pierre$0663455
701   $aWehrspohn$b Ralf B$0945106
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910141192203321
996   $aMechanical stress on the nanoscale$92133648
997   $aUNINA