LEADER 01324oam  2200421zu 450 
001 9910140913703321
005 20210807001435.0
010   $a1-4244-7700-X
035   $a(CKB)2670000000054060
035   $a(SSID)ssj0000452165
035   $a(PQKBManifestationID)12182347
035   $a(PQKBTitleCode)TC0000452165
035   $a(PQKBWorkID)10468764
035   $a(PQKB)10691434
035   $a(NjHacI)992670000000054060
035   $a(EXLCZ)992670000000054060
100   $a20160829d2010      uy 
101 0 $aeng
135   $aur|||||||||||
181   $ctxt
182   $cc
183   $acr
200 10$a2010 International Conference on Simulation of Semiconductor Processes and Devices
210 31$a[Place of publication not identified]$cI E E E$d2010
215   $a1 online resource (xiv, 324 pages)
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a1-4244-7701-8 
606   $aEngineering design$vCongresses
606   $aComputer-aided design$vCongresses
615  0$aEngineering design
615  0$aComputer-aided design
676   $a620.0042
702   $aIEEE Staff
801  0$bPQKB
906   $aPROCEEDING
912   $a9910140913703321
996   $a2010 International Conference on Simulation of Semiconductor Processes and Devices$92499172
997   $aUNINA