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100   $a20160829d2010      uy 
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 10$aFifth International Conference on MEMS, NANO, and Smart Systems : Dubai, UAE, 28-30 December 2009
210 31$a[Place of publication not identified]$cConference Publishing Services$d2010
300   $aBibliographic Level Mode of Issuance: Monograph
311 08$a9781424456154 
311 08$a1424456150 
311 08$a9780769539386 
311 08$a0769539386 
606   $aMicroelectromechanical systems$vCongresses
615  0$aMicroelectromechanical systems
712 02$aInternational Association of Computer Science and Information Technology
712 02$aAim Shams University
712 12$aInternational Conference on MEMS, NANO, and Smart Systems
801  0$bPQKB
906   $aPROCEEDING
912   $a9910140660903321
996   $aFifth International Conference on MEMS, NANO, and Smart Systems : Dubai, UAE, 28-30 December 2009$92361716
997   $aUNINA