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010   $a9786613024893
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024 7 $a10.1002/9780470649671
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035   $a(IEEE)5628438
035   $a(CaSebORM)9781118102244
035   $a(OCoLC)689995493
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100   $a20151221d2010      uy              
101 0 $aeng
135   $aur|n|---|||||
181   $ctxt
182   $cc
183   $acr
200 10$aPrinciples of microelectromechanical systems /$fKi Bang Lee
205   $a1st edition
210  1$aHoboken, New Jersey :$cWILEY/IEEE Press,$dc2011.
210  2$a[Piscataqay, New Jersey] :$cIEEE Xplore,$d[2010]
215   $a1 online resource (681 p.)
300   $aDescription based upon print version of record.
311   $a1-118-10224-X 
311   $a0-470-46634-0 
320   $aIncludes bibliographical references and index.
327   $aMicrofabrication -- Statics -- Static behavior of microstructures -- Dynamics -- Fluid dynamics -- Electromagnetics -- Piezoelectric and thermal actuators -- Electrostatic and electromagnetic actuators -- Sensors.
330   $a The building blocks of MEMS design through closed-form solutions  Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS via a unified approach and closed-form solutions to micromechanical problems, which have been recently developed by the author and go beyond what is available in other texts. The closed-form solutions allow the reader to easily understand the linear and nonlinear behaviors of MEMS and the
606   $aMicroelectromechanical systems
606   $aMicrotechnology
615  0$aMicroelectromechanical systems.
615  0$aMicrotechnology.
676   $a621.381
700   $aLee$b Ki Bang$0961875
701   $aLee$b Ki Bang$0961875
801  0$bCaBNVSL
801  1$bCaBNVSL
801  2$bCaBNVSL
906   $aBOOK
912   $a9910139401403321
996   $aPrinciples of microelectromechanical systems$92180736
997   $aUNINA