LEADER 05694nam 2200745 a 450 001 9910139247503321 005 20230803023838.0 010 $a1-118-53506-5 010 $a1-118-53505-7 010 $a1-118-53508-1 035 $a(CKB)2560000000103659 035 $a(EBL)1213810 035 $a(OCoLC)851316213 035 $a(DLC) 2013019306 035 $a(OCoLC)843026111 035 $a(MiAaPQ)EBC1213810 035 $a(Au-PeEL)EBL1213810 035 $a(CaPaEBR)ebr10719146 035 $a(CaONFJC)MIL497784 035 $a(EXLCZ)992560000000103659 100 $a20150303d2013 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $2rdacontent 182 $2rdamedia 183 $2rdacarrier 200 00$aNanoimprint technology$b[electronic resource] $enanotransfer for thermoplastic and photocurable polymer /$feditors, Jun Taniguchi ... [et al.] 205 $a1st ed. 210 $aChichester, West Sussex, U.K. $cWiley$dc2013 215 $a1 online resource (239 p.) 225 1 $aMicrosystem and Nanotechnology Series 300 $aDescription based upon print version of record. 311 $a1-118-35983-6 320 $aIncludes bibliographical references at the end of each chapters and index. 327 $aCover; Title Page; Copyright; Contents; About the Editors; List of Contributors; Series Preface; Preface; Chapter 1 What is a Nanoimprint?; References; Chapter 2 Nanoimprint Lithography: Background and Related Techniques; 2.1 History of Material Processing: Polymer Processing; 2.2 Products with Microstructure and Nanostructure; 2.3 Technology for Making Micro- and Nanostructures; References; Chapter 3 Nanopattern Transfer Technology of Thermoplastic Materials; 3.1 Behavior of Thermoplastic Materials; 3.1.1 Thermoplastics; 3.1.2 Basis of Viscoelasticity and Rheology 327 $a3.1.3 Measurement of Rheology3.1.4 Physical Properties of Viscoelastic Materials and the Temperature-Time Superposition Principle; 3.1.5 Materials Design for Realizing Nanoimprints; 3.2 Applicable Processes Used for Nanopattern Transfer; 3.2.1 Introduction of Injection Molding Process; 3.2.2 Problems of the Injection Molding Process; 3.2.3 Advantages of the Thermal Imprinting Process; 3.3 Pattern Transfer Mechanism of Thermal Cycle NIL; 3.3.1 Introduction of Thermal Imprinting Process; 3.3.2 In-situ Observation of Thermal Imprinting Process 327 $a3.3.3 Offline Measurement of Replication Process in Thermal Cycle NIL3.4 Modeling of Nanopattern Transfer; 3.4.1 Importance of Viscosity in Thermal Imprinting Process; 3.4.2 Mathematical Treatment in Injection Molding and Thermal Imprinting Process; 3.4.3 Process Simulation in Micro- and Nanopattern Transfer; References; Chapter 4 Mold Fabrication Process; 4.1 Ultra Precision Cutting Techniques Applied to Metal Molds Fabrication for Nanoimprint Lithography; 4.1.1 Introduction; 4.1.2 Cutting of Fine Groove Shape; 4.1.3 Method of Cutting Groove; 4.1.4 Precision Cutting of Cylindrical Material 327 $a4.1.5 High-speed, Ultra Precision Machining System4.1.6 Fine Pattern Processing by Bit Map Data; 4.1.7 Machining of Dot Pattern Array; 4.1.8 Improvement Points of the System; 4.1.9 Summary; 4.2 Nanoimprint Mold Fabrication Using Photomask Technology; 4.2.1 Introduction; 4.2.2 Summary of Mold Manufacturing Process; 4.2.3 Pattern Writing Technique; 4.2.4 Dry Etching; 4.2.5 Examples of Fabricated Mold; 4.2.6 Summary; References; Chapter 5 Ultraviolet Nanoimprint Lithography; 5.1 Orientation and Background of UV-NIL; 5.2 Transfer Mechanism of UV-NIL; 5.2.1 Viscosity and Capillary Force 327 $a5.2.2 Release Coating and Evaluation of Release Properties5.2.3 Release Coating Effect; 5.3 UV-NIL Materials and Equipment; 5.3.1 Ubiquitous NIL Machines; 5.3.2 UV Nanoimprint Process Tool; 5.3.3 UV-photocurable Resin; 5.3.4 Fluorinated Polymers for UV-NIL; 5.3.5 Cationic Curable Resins for UV-NIL; 5.3.6 Molding Agents for Nanoimprinting; 5.4 Evaluation Method; 5.4.1 Macro Evaluation Technique of Nanoscale Pattern Shape and Evaluation Device; 5.4.2 Characterization of Photocurable Resin for UV Nanoimprint; References; Chapter 6 Applications and Leading-Edge Technology 327 $a6.1 Advanced Nanoimprinting Technologies 330 $a Nanoscale pattern transfer technology using molds is a rapidly advancing area and one that has seen much recent attention due to its potential for use in nanotechnology industries and applications. However, because of these rapid advances, it can be difficult to keep up with the technological trends and the latest cutting-edge methods. In order to fully understand these pioneering technologies, a comprehensive understanding of the basic science and an overview of the techniques are required. Nanoimprint Technology: Nanotransfer for Thermoplastic and Photocurable Polymers covers 410 0$aWiley microsystem and nanotechnology series. 606 $aNanoimprint lithography 606 $aNanolithography$xMaterials 606 $aPlastics$xMolding 606 $aPolymers$xThermal properties 606 $aThermoplastics 606 $aMicrofluidics 606 $aTransfer-printing 615 0$aNanoimprint lithography. 615 0$aNanolithography$xMaterials. 615 0$aPlastics$xMolding. 615 0$aPolymers$xThermal properties. 615 0$aThermoplastics. 615 0$aMicrofluidics. 615 0$aTransfer-printing. 676 $a621.381 701 $aTaniguchi$b Jun$0912723 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910139247503321 996 $aNanoimprint technology$92044052 997 $aUNINA