LEADER 02991nam 2200613 a 450 001 9910139056703321 005 20170816123501.0 010 $a1-118-61663-4 010 $a1-299-31420-1 010 $a1-118-61675-8 035 $a(CKB)2560000000100565 035 $a(EBL)1143611 035 $a(OCoLC)830161686 035 $a(SSID)ssj0000833445 035 $a(PQKBManifestationID)11481046 035 $a(PQKBTitleCode)TC0000833445 035 $a(PQKBWorkID)10935851 035 $a(PQKB)10652342 035 $a(OCoLC)841297273 035 $a(MiAaPQ)EBC1143611 035 $a(EXLCZ)992560000000100565 100 $a20101222d2011 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 00$aIntegration of ferroelectric and piezoelectric thin films$b[electronic resource] $econcepts and applications for microsystems /$fedited by Emmanuel Defay? 210 $aLondon $cISTE ;$aHoboken, N.J. $cWiley$d2011 215 $a1 online resource (424 p.) 225 1 $aISTE 300 $aDescription based upon print version of record. 311 $a1-84821-239-9 320 $aIncludes bibliographical references and index. 327 $aDielectric, piezoelectric, pyroelectric, and ferroelectric -- Thermodynamic study : a structuring approach -- Ferroelectric-paraelectric phase transition thermodynamic modelling -- Mechanical formalism -- Dielectric formalism -- Piezoelectric formalism -- Acoustic formalism -- Electrostrictive formalism -- Electric characterization -- Piezoelectric resonators and filters -- High overtone bulk acoustic resonator (HBAR) -- Electrostrictive resonators -- Thin film piezoelectric transducers. 330 $aThis book contains four parts. The first one is dedicated to concepts. It starts with the definitions and examples of what is piezo-pyro and ferroelectricity by considering the symmetry of the material. Thereafter, these properties are described within the framework of Thermodynamics. The second part described the way to integrate these materials in Microsystems. The third part is dedicated to characterization: composition, structure and a special focused on electrical behaviors. The last part gives a survey of state of the art applications using integrated piezo or/and ferroelectric films. 410 0$aISTE 606 $aPiezoelectric devices$xMaterials 606 $aFerroelectric thin films 606 $aMiniature electronic equipment$xMaterials 608 $aElectronic books. 615 0$aPiezoelectric devices$xMaterials. 615 0$aFerroelectric thin films. 615 0$aMiniature electronic equipment$xMaterials. 676 $a621.3815 676 $a621.38152 701 $aDefay?$b Emmanuel$0863199 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910139056703321 996 $aIntegration of ferroelectric and piezoelectric thin films$92058475 997 $aUNINA