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010   $a9781424441938
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100   $a20160829d2009      uy 
101 0 $aeng
135   $aur|||||||||||
181   $ctxt
182   $cc
183   $acr
200 10$a2009 International Solid-State Sensors, Actuators and Microsystems Conference
210 31$a[Place of publication not identified]$cI E E E$d2009
215   $a1 online resource (616 pages)
300   $aBibliographic Level Mode of Issuance: Monograph
311 08$a9781424441907 
311 08$a1424441900 
320   $aIncludes bibliographical references and index.
606   $aTransducers$vCongresses
615  0$aTransducers
676   $a681.2
702   $aIEEE Staff
801  0$bPQKB
906   $aPROCEEDING
912   $a9910138933303321
996   $a2009 International Solid-State Sensors, Actuators and Microsystems Conference$92503961
997   $aUNINA