LEADER 02482nam 2200481 450 001 9910137698703321 005 20231214145444.0 010 $a953-51-4329-8 035 $a(CKB)3230000000076902 035 $a(iGPub)INOP0000191 035 $a(oapen)https://directory.doabooks.org/handle/20.500.12854/58917 035 $a(MiAaPQ)EBC30390170 035 $a(Au-PeEL)EBL30390170 035 $a(EXLCZ)993230000000076902 100 $a20191224012 xx c0 0 101 0 $aeng 135 $aurcn||||m|||a 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aScanning electron microscopy / $fViacheslav Kazmiruk 205 $a1st ed. 210 $cIntechOpen$d2012 210 1$a[Place of publication not identified] :$cIntechOpen,$d2012. 210 4$dİ2012 215 $a1 online resource (848 pages) 311 $a953-51-0092-0 330 $aToday, an individual would be hard-pressed to find any science field that does not employ methods and instruments based on the use of fine focused electron and ion beams. Well instrumented and supplemented with advanced methods and techniques, SEMs provide possibilities not only of surface imaging but quantitative measurement of object topologies, local electrophysical characteristics of semiconductor structures and performing elemental analysis. Moreover, a fine focused e-beam is widely used for the creation of micro and nanostructures. The book's approach covers both theoretical and practical issues related to scanning electron microscopy. The book has 41 chapters, divided into six sections: Instrumentation, Methodology, Biology, Medicine, Material Science, Nanostructured Materials for Electronic Industry, Thin Films, Membranes, Ceramic, Geoscience, and Mineralogy. Each chapter, written by different authors, is a complete work which presupposes that readers have some background knowledge on the subject. 606 $aTECHNOLOGY & ENGINEERING / Electronics / Optoelectronics$2bisacsh 610 $aPhysical Sciences 610 $aEngineering and Technology 610 $aOptoelectronics 610 $aPhysics 610 $aOptics and Lasers 615 7$aTECHNOLOGY & ENGINEERING / Electronics / Optoelectronics. 700 $aKazmiruk$b Viacheslav$01108857 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910137698703321 996 $aScanning electron microscopy$92633370 997 $aUNINA