LEADER 01127nam  2200373   450 
001 9910136171303321
005 20221019141921.0
010   $a953-51-6344-2
010   $a953-51-1085-3
035   $a(CKB)3780000000053893
035   $a(NjHacI)993780000000053893
035   $a(EXLCZ)993780000000053893
100   $a20221019d2013      uy             0
101 0 $aeng
135   $aur|||||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 00$aAdvances in Micro/Nano Electromechanical Systems and Fabrication Technologies /$fedited by Kenichi Takahata
210  1$aRijeka, Croatia :$cInTech,$d2013.
215   $a1 online resource (236 pages) $cillustrations some color
320   $aIncludes bibliographical references.
606   $aOptical physics
606   $aManufacturing processes
615  0$aOptical physics.
615  0$aManufacturing processes.
676   $a670
702   $aTakahata$b Kenichi 
801  0$bNjHacI
801  1$bNjHacl
906   $aBOOK
912   $a9910136171303321
996   $aAdvances in Micro$91910055
997   $aUNINA