LEADER 05399nam 2200661 450 001 9910132408603321 005 20200520144314.0 010 $a3-527-69028-X 010 $a3-527-69027-1 010 $a3-527-69026-3 035 $a(CKB)3710000000372125 035 $a(EBL)1985705 035 $a(SSID)ssj0001467672 035 $a(PQKBManifestationID)11794952 035 $a(PQKBTitleCode)TC0001467672 035 $a(PQKBWorkID)11515673 035 $a(PQKB)10028920 035 $a(MiAaPQ)EBC1985705 035 $a(Au-PeEL)EBL1985705 035 $a(CaPaEBR)ebr11030447 035 $a(CaONFJC)MIL769774 035 $a(OCoLC)904597991 035 $a(PPN)255444923 035 $a(EXLCZ)993710000000372125 100 $a20150320h20152015 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 00$aCVD polymers $efabrication of organic surfaces and devices /$fedited by Karen K. Gleason ; contributors Peter Baumann [and thirty six others] 210 1$aWeinheim, Germany :$cWiley-VCH,$d2015. 210 4$dİ2015 215 $a1 online resource (484 p.) 300 $aDescription based upon print version of record. 311 $a3-527-33799-7 320 $aIncludes bibliographical references at the end of each chapters and index. 327 $aCover; Contents; List of Contributors; Chapter 1 Overview of Chemically Vapor Deposited (CVD) Polymers; 1.1 Motivation and Characteristics; 1.1.1 Quality; 1.1.2 Conformality; 1.1.3 Durability; 1.1.4 Composition; 1.2 Fundamentals and Mechanisms; 1.2.1 Gas Phase and Surface Reactions; 1.2.2 The Monomer Saturation Ratio; 1.2.3 Process Simplification and Substrate Independence; 1.3 Scale-Up and Commercialization; 1.4 Process and Materials Chemistry; 1.4.1 Initiated CVD (iCVD) and Its Variants; 1.4.2 Plasma Enhanced CVD (PECVD); 1.4.3 Poly(p-xylylene) (PPX) and Its Derivatives (""Parylenes"") 327 $a1.4.4 Oxidative CVD (oCVD)1.4.5 Vapor Deposition Polymerization (VDP) and Molecular Layer Deposition (MLD); 1.4.6 Additional Methods; 1.5 Summary; Acknowledgments; References; Part I: Fundamentals; Chapter 2 Growth Mechanism, Kinetics, and Molecular Weight; 2.1 Introduction; 2.2 iCVD Process; 2.3 Kinetics and Growth Mechanism; 2.3.1 Fluorocarbon Polymers; 2.3.2 Organosilicon Polymers; 2.3.3 Acrylate and Methacrylate Polymers; 2.3.4 Styrene and Other Vinyl Polymers; 2.3.5 Ring Opening Polymers; 2.4 Summary; References; Chapter 3 Copolymerization and Crosslinking; 3.1 Introduction 327 $a3.2 Copolymer Composition and Structure3.2.1 Confirmation of iCVD Copolymerization; 3.2.2 Analysis of Copolymer Composition; 3.2.3 Compositional Gradient; 3.3 Copolymerization Kinetics; 3.3.1 Copolymerization Equation and Reactivity Ratio; 3.3.2 Types of iCVD Copolymerization; 3.4 Tunable Properties of iCVD Copolymers; 3.4.1 Mechanical Properties; 3.4.2 Swelling; 3.4.3 Thermal Properties; 3.4.4 Surface Properties; 3.5 Conclusions; References; Chapter 4 Non-Thermal Initiation Strategies and Grafting; 4.1 Introduction; 4.2 Initiation Strategies; 4.2.1 Plasma Initiation Strategies 327 $a4.2.1.1 Plasma Enhanced Chemical Vapor Deposition (PECVD)4.2.1.2 Pulsed-Plasma Enhanced Chemical Vapor Deposition (PPECVD); 4.2.1.3 Microwave Plasmas; 4.2.1.4 Initiated Plasma Enhanced Chemical Vapor Deposition (iPECVD); 4.2.1.5 Plasma Initiation Summary; 4.2.2 Photoinitiation Strategies; 4.2.2.1 Photoactive Initiator Molecules; 4.2.2.2 Photoactive Monomer Species; 4.2.2.3 Photoinitiation Summary; 4.3 Grafting; 4.3.1 Surface Modification of Organic Substrates; 4.3.2 Surface Modification of Inorganic Substrates; 4.3.3 Grafting Summary; 4.4 Summary; References; Chapter 5 Conformal Polymer CVD 327 $a5.1 Introduction5.2 Vapor Phase Transport; 5.3 Conformal Polymer Coating Applications; 5.4 Conformal Polymer Coating Technologies; 5.5 Gas and Surface Reactions; 5.6 The Reaction-Diffusion Model; 5.6.1 Reaction and Diffusion in a Pore; 5.6.2 Initiator Controlled Consumption; 5.6.3 Factors Affecting the Initiator Sticking Probability; 5.6.4 Monomer Controlled Consumption; 5.6.5 Other Polymer CVD Systems; 5.7 Applications; 5.8 Conclusion; Acknowledgment; References 327 $aChapter 6 Plasma Enhanced-Chemical Vapor Deposited Polymers: Plasma Phase Reactions, Plasma-Surface Interactions, and Film Properties 330 $aThe scope of the book are CVD (chemical vapor deposition) polymerization processes which directly translate the chemical mechanisms of traditional polymer synthesis and organic synthesis in homogeneous liquids into heterogeneous processes for the modification of solid surfaces. The book is structured into four parts, complemented by an introductory overview of the diverse process strategies for CVD of polymeric materials. The first part on the fundamentals of CVD polymers is followed by a detailed coverage of the materials chemistry of CVD polymers, including the main synthesis mechanisms and 606 $aChemical vapor deposition 606 $aPolymers 615 0$aChemical vapor deposition. 615 0$aPolymers. 676 $a621.38152 702 $aGleason$b Karen K. 702 $aBaumann$b Peter 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910132408603321 996 $aCVD polymers$92127847 997 $aUNINA