LEADER 01454nam  2200397   450 
001 9910132353903321
005 20231021042647.0
010   $a1-4673-5993-9
035   $a(CKB)3460000000126482
035   $a(NjHacI)993460000000126482
035   $a(EXLCZ)993460000000126482
100   $a20231021d2013      uy             0
101 0 $aeng
135   $aur|||||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$a2013 26th International Vacuum Nanoelectronics Conference (IVNC 2013) $eRoanoke, Virginia, USA, 8-12 July 2013 /$fIEEE Electron Devices Society, American Vacuum Society, International Vacuum Nanoelectronics Conference
210  1$aPiscataway, NJ :$cIEEE,$d2013.
215   $a1 online resource (127 pages) $cillustrations (some color)
311   $a1-4673-5992-0 
517   $a2013 26th International Vacuum Nanoelectronics Conference 
517   $aVacuum Nanoelectronics Conference 
606   $aMicroelectronics$vCongresses
606   $aVacuum technology$vCongresses
615  0$aMicroelectronics
615  0$aVacuum technology
676   $a621.381
712 02$aAmerican Vacuum Society,
712 12$aInternational Vacuum Nanoelectronics Conference,
801  0$bNjHacI
801  1$bNjHacl
906   $aPROCEEDING
912   $a9910132353903321
996   $a2013 26th International Vacuum Nanoelectronics Conference (IVNC 2013)$93574586
997   $aUNINA