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100   $a20151109h20152015  uy             0
101 0 $aeng
135   $aur|n|---|||||
181   $ctxt
182   $cc
183   $acr
200 00$aMaterials and failures in MEMS and NEMS /$fedited by Atul Tiwari and Baldev Raj
210  1$aSalem, Massachusetts ;$aHoboken, New Jersey :$cScrivener Publishing :$cWiley,$d2015.
210  4$dİ2015
215   $a1 online resource (487 p.)
225 0 $aMaterials Degradation and Failures Series
300   $aDescription based upon print version of record.
311   $a1-119-08360-5 
320   $aIncludes bibliographical references at the end of each chapters and index.
606   $aMicroelectromechanical systems$xDesign and construction
606   $aNanoelectromechanical systems$xDesign and construction
615  0$aMicroelectromechanical systems$xDesign and construction.
615  0$aNanoelectromechanical systems$xDesign and construction.
676   $a621.381
702   $aTiwari$b Atul
702   $aRaj$b Baldev$f1947-
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910131570903321
996   $aMaterials and failures in MEMS and NEMS$91923977
997   $aUNINA