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200 10$a2012 IEEE International Interconnect Technology Conference
210 31$a[Place of publication not identified]$cIEEE$d2012
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606   $aMetal oxide semiconductors, Complementary
606   $aInterconnects (Integrated circuit technology)
615  0$aMetal oxide semiconductors, Complementary.
615  0$aInterconnects (Integrated circuit technology)
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