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091   $2CNR$aP 00232448
100   $a20161109a19919999km-y0itaa50------ba
101 0 $aeng
110   $aauu--------
200 1 $aJournal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
207  1$a1991-
210   $aNew York$cPublished for the Society by the American Institute of Physics
326   $aBimestrale
430  0$1001000899585$12001$aJournal of vacuum science & technology B: Microelectronics processing and phenomena
452  0$1001000899584$12001$aJournal of vacuum science & technology B online
517 0 $aMicroelectronics and nanometer structures
517 0 $aJournal of vacuum science and technology., Microelectronics and nanometer structures
517 0 $aJVST B
530 1 $aJournal of vacuum science & technology$iB
531   $aJ. VAC. SCI. TECHNOL., B, MICROELECTRON. NANOMETER
676   $a621.381/05
712 02$aAmerican Vacuum Society
801  0$aIT$bACNP$c20090723
859 4 $uhttp://acnp.cib.unibo.it/cgi-ser/start/it/cnr/dc-p1.tcl?catno=923932&person=false&language=ITALIANO&libr=&libr_th=unina1$zBiblioteche che possiedono il periodico
901   $aSE
912   $a990008995860403321
958   $aBiblioteca "Roberto Stroffolini" - Dipartimento di Scienze Fisiche dell'Università Federico II$b1991-2005;$fFI1
959   $aFI1
996   $aJournal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena$9791400
997   $aUNINA
AP1 8 $6866-01$aNA079 Biblioteca "Roberto Stroffolini" - Dipartimento di Scienze Fisiche dell'Università Federico II$eVia Cintia-Monte S. Angelo, 80126 Napoli (NA)$m081.676253;676756;676443$m081.676434$nit
AP2 40$aacnp.cib.unibo.it$nACNP Italian Union Catalogue of Serials$uhttp://acnp.cib.unibo.it/cgi-ser/start/it/cnr/df-p.tcl?catno=923932&language=ITALIANO&libr=&person=&B=1&libr_th=unina&proposto=NO