LEADER 01194nam0-22004091i-450-
001 990007978840403321
005 20110624134912.0
010   $a0-9616721-6-1
035   $a000797884
035   $aFED01000797884
035   $a(Aleph)000797884FED01
035   $a000797884
100   $a20110624g20009999km-y0itay50------ba
101 0 $aeng
102   $aUS
105   $aa---a---001yy
200 1 $aSilicon processing for the VLSI Era$fStanley Wolf, Richard N. Tauber
205   $a2nd ed.
210   $aSunset Beach, California$cLattice Press$d2000-
215   $av.$cill.$d24 cm
327 0 $a1.: Process technology
610 0 $aCircuiti integrati$aIntegrazione a grandissima scala (VLSI)
610 0 $aSilicio
676   $a621.395
676   $a621.381 73
700  1$aWolf,$bStanley$f<1943- >$08670
701  1$aTauber,$bRichard N.$08671
801  0$aIT$bUNINA$gRICA$2UNIMARC
901   $aBK
912   $a990007978840403321
952   $a13 24 14$b14268$fFINBC
952   $a10 E II 619$bDIET 2121$fDINEL
952   $a10 E II 630$bDIET 2196$fDINEL
959   $aFINBC
959   $aDINEL
996   $aSilicon processing for the VLSI Era$9113992
997   $aUNINA