LEADER 00943nam0-22003371i-450- 001 990003996620403321 005 20040203145056.0 010 $a0-471-23279-3 035 $a000399662 035 $aFED01000399662 035 $a(Aleph)000399662FED01 035 $a000399662 100 $a20040203d2004----km-y0itay50------ba 101 0 $aENG 102 $aUS 105 $aa---a---001yy 200 1 $aFundamentals of semiconductor fabrication$fGary S. May, Simon M. Sze 210 $aNew York$cWiley$d2004 215 $axiii, 305 p.$cill.$d24 cm 610 0 $aSEMICONDUTTORI 610 0 $aCIRCUITI INTEGRATI 676 $a621.3815'2 700 1$aMay,$bGary S.$0151097 701 1$aSze,$bSimon Min$07762 801 0$aIT$bUNINA$gRICA$2UNIMARC 901 $aBK 912 $a990003996620403321 952 $a10 E I 402$bDIET 2123$fDINEL 959 $aDINEL 996 $aFundamentals of semiconductor fabrication$9471928 997 $aUNINA