LEADER 01125nam2-22003491i-450- 001 990000165310403321 010 $a0-8247-2704-5 035 $a000016531 035 $aFED01000016531 035 $a(Aleph)000016531FED01 035 $a000016531 100 $a20011111d--------km-y0itay50------ba 101 0 $aita 105 $ay-------001yy 200 1 $a5. : Deb-ele : Debuggers and debuggingtechniques to electron beam lithography.VI, 432 p. : ill. 210 $aNew York-Basel$cM. Dekker$dcopyr. 1990- 215 $av.$d26 cm 461 0$1001000012989$12001$aEncyclopedia of microcomputers 610 0 $aMicroelaboratori elettronici$aEnciclopedie e dizionari 676 $a004.160 321 702 1$aHall,$bCarolyn M. 702 1$aKent,$bAllen 702 1$aKent,$bRosalind 702 1$aWilliams,$bJames G. 801 0$aIT$bUNINA$gRICA$2UNIMARC 901 $aBK 912 $a990000165310403321 952 $a13 SC IV E 05$b8322$fFINBC 959 $aFINBC 996 $a5. : Deb-ele : Debuggers and debuggingtechniques to electron beam lithography.VI, 432 p. : ill$9121089 997 $aUNINA DB $aING01