LEADER 01112nam0-22003731i-450-
001 990000133560403321
005 20161025140101.0
010   $a0-9616721-3-7$bv. 1
010   $a0-9616721-4-5$bv. 2
035   $a000013356
035   $aFED01000013356
035   $a(Aleph)000013356FED01
035   $a000013356
100   $a20020821g19869999km-y0itay50------ba
101 0 $aeng
102   $aUS
105   $aa---a---001yy
200 1 $aSilicon processing for the VLSI Era$fStanley Wolf, Richard N. Tauber
210   $aSunset Beach$cLattice Press$d1986-
215   $av.$d24 cm
327 0 $a1.: Process technology$a2.: Process integration$a3.: The submicron MOSFET
610 0 $aCircuiti integrati$aIntegrazione a grandissima scala (VLSI)
610 0 $aSilicio
676   $a621.395
700  1$aWolf,$bStanley$f<1943- >
701  1$aTauber,$bRichard N.
801  0$aIT$bUNINA$gRICA$2UNIMARC
901   $aBK
912   $a990000133560403321
952   $a13 P 06 07$b9338$fFINBC
952   $a13 P 06 08$b9339$fFINBC
952   $a13 24 15$b14278$fFINBC
959   $aFINBC
997   $aUNINA