LEADER 01572nam0 22003613i 450 
001 VAN0242648
005 20220801012954.256
017 70$2N$a9783319186757
100   $a20220309d2015       |0itac50      ba
101   $aeng
102   $aCH
105   $a||||    |||||
200 1 $aThree-Dimensional Integration of Semiconductors$eProcessing, Materials, and Applications$feditors Kazuo Kondo, Morihiro Kada, Kenji Takahashi
210   $aCham$cSpringer$d2015
215   $aXIX, 408 p.$cill.$d24 cm
620   $aCH$dCham$3VANL001889
676   $a540$cChimica generale$v22
676   $a610.28$cIngegneria biomedica$v22
676   $a541.37$cElettrochimica e magnetochimica$v22
676   $a541.377$cSemiconduttori$v22
676   $a623.045$cIngegneria meccanica$v22
702  1$aKada$bMorihiro$3VANV198463
702  1$aKondo$bKazuo$3VANV092219
702  1$aTakahashi$bKenji$3VANV198464
712   $aSpringer <editore>$3VANV108073$4650
801   $aIT$bSOL$c20240614$gRICA
856 4 $uhttps://rd.springer.com/book/10.1007/978-3-319-18675-7$zhttps://rd.springer.com/book/10.1007/978-3-319-18675-7
899   $aBIBLIOTECA DEL DIPARTIMENTO DI SCIENZE E TECNOLOGIE AMBIENTALI BIOLOGICHE E FARMACEUTICHE$1IT-CE0101$2VAN17
912   $fN
912   $aVAN0242648
950   $aBIBLIOTECA DEL DIPARTIMENTO DI SCIENZE E TECNOLOGIE AMBIENTALI BIOLOGICHE E FARMACEUTICHE$d17CONS      e-book                  2219        $e17BIB2219/190  190     20220309            
996   $aThree-Dimensional Integration of Semiconductors$92276625
997   $aUNICAMPANIA